Effect of chemical vapor deposition of Si3N4, BN and B4C coatings on the mechanical and dielectric properties of porous Si3N4 ceramic

被引：31

作者：

Li, Xiangming ^{[1
]}

Zhang, Litong ^{[2
]}

Yin, Xiaowei ^{[2
]}

机构：

[1] NW A&F Univ, Coll Water Conservancy & Architecture Engn, Yangling 712100, Shaanxi, Peoples R China

[2] Northwestern Polytech Univ, Natl Key Lab Thermostruct Composite Mat, Xian 710072, Shaanxi, Peoples R China

来源：

SCRIPTA MATERIALIA | 2012年 / 66卷 / 01期

关键词：

Si3N4; BN; B4C; Mechanical properties; Dielectric properties; SILICON-NITRIDE; OXIDATION PROTECTION; MATRIX COMPOSITES; MICROSTRUCTURE;

D O I：

10.1016/j.scriptamat.2011.09.037

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

The mechanical properties of porous Si3N4 ceramic are noticeably improved after chemical vapor deposition (CVD) of Si3N4, BN and B4C coatings. The dielectric constant and loss of porous Si3N4 ceramic remain almost unchanged after CVD of BN, increase slightly after CVD of Si3N4, but increase greatly after CVD of B4C. Overall, CVD of Si3N4 performs better than CVD of BN and B4C in improving the mechanical properties and keeping the low dielectric constant and loss of porous Si3N4 ceramic. (C) 2011 Acta Materialia Inc. Published by Elsevier Ltd. All rights reserved.

引用

页码：33 / 36

页数：4

共 19 条

[1] SI3N4 AND SI2N2O FOR HIGH-PERFORMANCE RADOMES [J].

BARTA, J ;

MANELA, M ;

FISCHER, R .

MATERIALS SCIENCE AND ENGINEERING, 1985, 71 (1-2) :265-272

[2]

Bird R B., 2002, Transportphenomena

[3] ANALYSIS AND EVALUATION OF A METHOD OF MEASURING COMPLEX PERMITTIVITY AND PERMEABILITY OF MICROWAVE INSULATORS [J].

COURTNEY, WE .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1970, MT18 (08) :476-&

[4]

Goto T., 2000, U.S. Patent, Patent No. [6,091,375, 6091375]

[5]

Hakki BW., 1960, IEEE. Trans. MTT, DOI DOI 10.1109/TMTT.1960.1124749

[6] MICROWAVE MEASUREMENT OF DIELECTRIC-PROPERTIES OF LOW-LOSS MATERIALS BY THE DIELECTRIC ROD RESONATOR METHOD [J].

KOBAYASHI, Y ;

KATOH, M .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1985, 33 (07) :586-592

[7] RESONANT MODES OF A DIELECTRIC ROD RESONATOR SHORT-CIRCUITED AT BOTH ENDS BY PARALLEL CONDUCTING PLATES [J].

KOBAYASHI, Y ;

TANAKA, S .

IEEE TRANSACTIONS ON MICROWAVE THEORY AND TECHNIQUES, 1980, 28 (10) :1077-1085

[8] Microstructure and Properties of Porous Si3N4 Ceramics with a Dense Surface [J].

Li, Xiangming ;

Yin, Xiaowei ;

Zhang, Litong ;

Pan, Tianhao .

INTERNATIONAL JOURNAL OF APPLIED CERAMIC TECHNOLOGY, 2011, 8 (03) :627-636

[9] Mechanical and dielectric properties of porous Si3N4-SiO2 composite ceramics [J].

Li, Xiangming ;

Yin, Xiaowei ;

Zhang, Litong ;

Cheng, Laifei ;

Qi, Yuanchen .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2009, 500 (1-2) :63-69

[10] Microstructure and properties of particle reinforced silicon carbide and silicon nitride ceramic matrix composites prepared by chemical vapor infiltration [J].

Liu, Yongsheng ;

Cheng, Laifei ;

Zhang, Litong ;

Hua, Yunfeng ;

Yang, Wenbin .

MATERIALS SCIENCE AND ENGINEERING A-STRUCTURAL MATERIALS PROPERTIES MICROSTRUCTURE AND PROCESSING, 2008, 475 (1-2) :217-223

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