A Micro-nano Melt Transcription Molding Process to produce Thermoplastic Devices with Tens Nanometers Scale Fine Patterns

被引：0

作者：

Yakemoto, Kazutoshi ^{[1
]}

Ito, Hiroshi ^{[1
]}

Naito, Akihiro ^{[1
]}

Furuki, Kenichi ^{[1
]}

机构：

[1] Japan Steel Works Ltd, Hiroshima Res Lab, Tokyo, Japan

来源：

JOURNAL OF PHOTOPOLYMER SCIENCE AND TECHNOLOGY | 2011年 / 24卷 / 01期

关键词：

thermoplastic device; nanometer; fine pattern; transcription; molding;

D O I：

10.2494/photopolymer.24.77

中图分类号：

O63 [高分子化学（高聚物）];

学科分类号：

070305 ; 080501 ; 081704 ;

摘要：

A Micro-nano Melt Transcription Molding Process(MTM) was developed to produce highly functional thermoplastic devices with fine patterns on their surfaces. By taking advantage of fluidity, wettability and low modulus of molten thermoplastics, the patterns with the dimensions from tens nanometers to hundreds micrometers or millimeters with high aspect ratio(Asp= height/diameter or width) and sharp edge could be molded under high productivity. The nano hole arrays, which have the walls with width(W) 60nm X height(H) 270nm(Asp4.5) and W45nm X H320nm(Asp7.1) that partition the holes with diameter 250nm, could successfully be molded by using both PMMA(Polymethylmethacrylate) and PC(Polycarbonate). The well patterns for cell culture with W15 mu m X 120 mu m(Asp8) were molded uniformly over the surface area 100mm X 125mm with the cycle time in one minute and a little. As a result, it was confirmed that MTM proposed in this study could be applied effectively to the practical production of thermoplastic devices which have the surface patterns in a high grade and under high productivity.

引用

页码：77 / 82

页数：6