Dissociation of the FEBID precursor cis-Pt(CO)2Cl2 driven by low-energy electrons

被引：12
作者：
da Silva, Filipe Ferreira [1 ]
Thorman, Rachel M. [2 ,3 ]
Bjornsson, Ragnar [2 ,3 ,4 ]
Lu, Hang [5 ]
McElwee-White, Lisa [5 ]
Ingolfsson, Oddur [2 ,3 ]
机构：
[1] Univ NOVA Lisboa, Fac Ciencias & Tecnol, Dept Fis, CEFITEC, P-2829516 Caparica, Portugal
[2] Univ Iceland, Dept Chem, Dunhagi 3, IS-107 Reykjavik, Iceland
[3] Univ Iceland, Sci Inst, Dunhagi 3, IS-107 Reykjavik, Iceland
[4] Max Planck Inst Chem Energiekonvers, Dept Inorgan Spect, Stifistr 34-36, D-45470 Mulheim, Germany
[5] Univ Florida, Dept Chem, Gainesville, FL 32611 USA
来源：
PHYSICAL CHEMISTRY CHEMICAL PHYSICS | 2020年 / 22卷 / 11期
基金：
美国国家科学基金会; 欧盟地平线“2020”;
关键词：
BEAM-INDUCED DEPOSITION; INDUCED SURFACE-REACTIONS; CORRELATED MOLECULAR CALCULATIONS; GAUSSIAN-BASIS SETS; INDUCED DECOMPOSITION; CROSS-SECTIONS; ATTACHMENT; HEXACARBONYL; DESIGN; (ETA(3)-C3H5)RU(CO)(3)BR;
D O I：
10.1039/c9cp06633k
中图分类号：
O64 [物理化学（理论化学）、化学物理学];
学科分类号：
070304 ; 081704 ;
摘要：
In this study, we present experimental and theoretical results on dissociative electron attachment and dissociative ionisation for the potential FEBID precursor cis-Pt(CO)(2)Cl-2. UHV surface studies have shown that high purity platinum deposits can be obtained from cis-Pt(CO)(2)Cl-2. The efficiency and energetics of ligand removal through these processes are discussed and experimental appearance energies are compared to calculated thermochemical thresholds. The present results demonstrate the potential effectiveness of electron-induced reactions in the deposition of this FEBID precursor, and these are discussed in conjunction with surface science studies on this precursor and the design of new FEBID precursors.
引用
收藏
页码：6100 / 6108
页数：9
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