IMAGING MULTIMODE VIBRATIONS IN HIGH-FREQUENCY ALUMINUM NITRIDE PIEZOELECTRIC NANOMEMBRANE RESONATORS

被引：0
作者：
Jia, Hao [1 ]
Matheny, Matthew H. [2 ,3 ]
Roukes, Michael L. [2 ,3 ]
Feng, Philip X-L [1 ]
机构：
[1] Case Western Reserve Univ, Case Sch Engn, Dept Elect Engn & Comp Sci, Cleveland, OH 44106 USA
[2] CALTECH, Condensed Matter Phys, Pasadena, CA 91125 USA
[3] CALTECH, Kavli Nanosci Inst, Pasadena, CA 91125 USA
来源：
2019 20TH INTERNATIONAL CONFERENCE ON SOLID-STATE SENSORS, ACTUATORS AND MICROSYSTEMS & EUROSENSORS XXXIII (TRANSDUCERS & EUROSENSORS XXXIII) | 2019年
基金：
美国国家科学基金会;
关键词：
Nanoelectromechanical systems (NEMS); aluminum nitride (AlN); resonator; nanomembrane; piezoelectric; multimode resonances; spatial mapping; mode shape;
D O I：
10.1109/transducers.2019.8808643
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
We report on the first imaging and visualization of the multimode resonant behaviors of aluminum nitride (AlN) piezoelectric nanomembrane resonators, by exploiting a spectromicroscopy technique based on scanning laser interferometry. High-frequency multimode vibrations (up to 33MHz) with quality (Q) factors up to similar to 8500 are observed in the AIN nanomembranes. Both undriven thermomechanical and coherently excited vibrations of the devices are measured and spatially mapped. Such a multimode AIN device platform with abundant resonant modes, two-dimensional (2D) large capturing surfaces, and efficient all-electrical signal transduction, holds strong promise for enabling ultrasensitive gravimetric detection, mass spectroscopy, and inertial imaging.
引用
收藏
页码：442 / 445
页数：4
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