Bilayered coatings of BN/diamond grown on Si3N4 ceramic substrates

被引：7

作者：

Ferreira, S. ^{[1
,2
]}

Duarte, P. ^{[1
]}

Almeida, F. A. ^{[1
]}

Silva, R. F. ^{[1
]}

机构：

[1] Univ Aveiro, Ceram Eng Dept, CICECO, P-3810193 Aveiro, Portugal

[2] Inst Polytech Viseu, Super Technol Sch, Dept Mech Eng & Ind Management, P-3504510 Viseu, Portugal

来源：

关键词：

Nanocrystalline diamond; Chemical Vapour Deposition (CVD); Cubic boron nitride; Magnetron sputtering; Silicon nitride; CUBIC BORON-NITRIDE; THIN-FILMS; DIAMOND FILMS; DEPOSITION;

D O I：

10.1016/j.diamond.2011.02.009

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Cubic boron nitride (c-BN) is a well known material to be used in machining of ferrous metallic alloys, namely as a coating. However, in most practical cases, there is a lack of adhesion to the substrate material. In this work, BN coatings were deposited by magnetron sputtering on silicon nitride (Si3N4) ceramic substrates using an intermediate layer of CVD microcrystalline (MCD) or nanocrystalline diamond (NCD). The goal was to improve the c-BN content by using diamond interlayers, and to optimize film adhesion to the substrate by employing such ceramic, which is known to provide very high adhesion strength to CVD diamond. The BN/NCD/Si3N4 combination demonstrated to be unique regarding the absence of delamination at both the BN/diamond and diamond/substrate interfaces, also providing the highest c-BN phase content. (C) 2011 Elsevier B.V. All rights reserved.

引用

页码：464 / 467

页数：4

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