Quality factor trimming method using thermoelastic dissipation for multi-ring resonator

被引：10
作者：
Abdelli, Hamza [1 ]
Tsukamoto, Takashiro [1 ]
Tanaka, Shuji [1 ]
机构：
[1] Tohoku Univ, Grad Sch Engn, Dept Robot, Sendai, Miyagi 9808579, Japan
来源：
SENSORS AND ACTUATORS A-PHYSICAL | 2021年 / 332卷
关键词：
TED; Q-factor mismatch; Frequency mismatch; FM gyroscope; RIG gyroscope; Multi-ring resonator; RING GYROSCOPE;
D O I：
10.1016/j.sna.2021.113044
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
In this paper, a novel quality factor trimming method for a 2-axis mode-matched resonator using thermoelastic dissipation (TED) is reported. A disk resonator was designed so that the Q-factor is mainly limited by TED, in which the effect of energy dissipation can be tuned by mechanical trimming. The trimming location are carefully chosen to independently modify the Q-factors of each axis. In addition, the trimming structure is designed not to affect the resonant frequencies. From the numerical experiment, the Q-factor trimming as much as 108% could be achieved while the frequency change was 4.7% at the maximum. (c) 2021 Elsevier B.V. All rights reserved.
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页数：15
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