Optimization of La0.7Ba0.3MnO3-δ complex oxide laser ablation conditions by plume imaging and optical emission spectroscopy

被引:33
作者
Amoruso, S. [1 ,2 ]
Aruta, C. [2 ]
Bruzzese, R. [1 ,2 ]
Maccariello, D. [1 ]
Maritato, L. [2 ,3 ]
Granozio, F. Miletto [2 ]
Orgiani, P. [2 ,3 ]
di Uccio, U. Scotti [1 ,2 ]
Wang, X. [2 ]
机构
[1] Univ Naples Federico 2, Dipartimento Sci Fis, I-80126 Naples, Italy
[2] CNR SPIN, I-80126 Naples, Italy
[3] Univ Salerno, Dipartimento Matemat & Informat, I-84081 Baronissi, SA, Italy
关键词
THIN-FILM STRUCTURE; EXPANSION DYNAMICS; DEPOSITION; PLASMA; GAS; SPECTRA; VACUUM; OXYGEN; O-2; ATMOSPHERES;
D O I
10.1063/1.3467770
中图分类号
O59 [应用物理学];
学科分类号
摘要
The properties of thin films of complex oxides, such as La(1-x)D(x)MnO(3-delta) (D=Ba, Ca, Sr, etc.), produced by pulsed laser deposition depend critically on the experimental parameters in which laser ablation,is carried out. Here, we report a comparative analysis of the pulsed laser ablation process of La(0.7)Ba(0.3)MnO(3-delta), in oxygen background, in the ambient pressure range from 10(-2) to 1 mbar, typically employed in pulsed laser deposition of manganites. The laser ablation plume was studied by using time-gated imaging and optical emission spectroscopy techniques. It was found that at a pressure of approximate to 10(-2) mbar, the plume species arriving at the substrate are characterized by hyperthermal kinetic energy (approximate to 10 eV), and high degree of excitation. On the contrary, at larger oxygen pressure (0.1-1 mbar), the velocity of plume species reaching the substrate, and their degree of excitation are much reduced by the confining effects of the background gas. These features explain why an appropriate choice of the experimental conditions in which the deposition process is carried out leads to better quality films, providing helpful indications to improve control over the growth process of both La(1-x)D(x)MnO(3-delta) and other perovskitic oxides. (C) 2010 American Institute of Physics. [doi:10.1063/1.3467770]
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页数:8
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