Nano and Micro Indentation and Scratch Tests of Mechanical Properties of Thin Films

被引：1

作者：

Gitis, Norm V. ^{[1
]}

Hermann, Ilja ^{[1
]}

Kuiry, Suresh ^{[1
]}

Xiao, Jun ^{[1
]}

机构：

[1] CETR Inc, Campbell, CA 95008 USA

来源：

ADVANCED TRIBOLOGY | 2009年

关键词：

Thin films; Hardness; Indentation; Scratch;

D O I：

10.1007/978-3-642-03653-8_152

中图分类号：

TH [机械、仪表工业];

学科分类号：

0802 ;

摘要：

Experimental comparison of common nano and micro scales for hardness evaluation has been performed on metal samples and discussed in details. Instrumented indentation was found advantageous in both repeatability and a number of measured parameters over classical hardness methods for metals, while sclerometry was advantageous for ultra-thin films. Perform tests at various well-controlled sliding-to-rolling, speed-to-load and temperature levels

引用

页码：489 / 490

页数：2

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