Nano and Micro Indentation and Scratch Tests of Mechanical Properties of Thin Films

被引：1
|
作者：
Gitis, Norm V. [1 ]
Hermann, Ilja [1 ]
Kuiry, Suresh [1 ]
Xiao, Jun [1 ]
机构：
[1] CETR Inc, Campbell, CA 95008 USA
来源：
ADVANCED TRIBOLOGY | 2009年
关键词：
Thin films; Hardness; Indentation; Scratch;
D O I：
10.1007/978-3-642-03653-8_152
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
Experimental comparison of common nano and micro scales for hardness evaluation has been performed on metal samples and discussed in details. Instrumented indentation was found advantageous in both repeatability and a number of measured parameters over classical hardness methods for metals, while sclerometry was advantageous for ultra-thin films. Perform tests at various well-controlled sliding-to-rolling, speed-to-load and temperature levels
引用
收藏
页码：489 / 490
页数：2
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