Investigation of Hydrogen-Sensing Characteristics of a Pd/GaN Schottky Diode

被引:23
|
作者
Huang, Jun-Rui [1 ,2 ]
Hsu, Wei-Chou [1 ,2 ]
Chen, Yeong-Jia [1 ,2 ]
Wang, Tzong-Bin [1 ,2 ]
Chen, Huey-Ing [3 ]
Liu, Wen-Chau [1 ,2 ]
机构
[1] Natl Cheng Kung Univ, Dept Elect Engn, Inst Microelect, Tainan 70101, Taiwan
[2] Natl Cheng Kung Univ, Adv Optoelect Technol Ctr, Tainan 70101, Taiwan
[3] Natl Cheng Kung Univ, Dept Chem Engn, Tainan 70101, Taiwan
关键词
Adsorption; hydrogen adsorption heat; hydrogen detection sensitivity ratio; hydrogen sensors; transient response; FIELD-EFFECT DEVICES; N-TYPE GAN; HIGH-TEMPERATURE; CHEMICAL SENSORS; ADSORPTION; INTERFACE; SENSITIVITY;
D O I
10.1109/JSEN.2010.2084430
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
The hydrogen sensing and response characteristics of a catalytic Pd/GaN metal-semiconductor (MS) Schottky diode are systematically studied in this paper. The current-voltage characteristics, hydrogen detection sensitivity ratios, Schottky barrier height variations, adsorption heat, and transient responses for different hydrogen concentration are measured over wide temperature range. The Pd/GaN Schottky diode reveals a remarkable capability of hydrogen detection at high temperature and relatively wide operating temperature range under bipolarly applied voltages. Experimentally, extremely low hydrogen concentration for 14 ppm H(2) in air can be detected. A very high hydrogen detection sensitivity ratio of 12744 and a large Schottky barrier height variation Delta phi(b) of 253 meV are obtained when a 9970 ppm in air gas is introduced at 300 K. In addition, according to the van't Hoff equation, the hydrogen adsorption heat value of the studied device is calculated as -18.24 kJ mole(-1). Finally, considerably short response time is found in the studied device.
引用
收藏
页码:1194 / 1200
页数:7
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