Redesigned Microcantilevers for Sensitivity Improvement of Microelectromechanical System Tactile Sensors

被引：1

作者：

Kaneta, Ren ^{[1
]}

Hasegawa, Takumi ^{[1
]}

Kido, Jun ^{[1
]}

Abe, Takashi ^{[1
]}

Sohgawa, Masayuki ^{[1
]}

机构：

[1] Niigata Univ, Grad Sch Sci & Technol, Nishi Ku, 8050 Ikarashi 2 No Cho, Niigata 9502181, Japan

来源：

JOURNAL OF ROBOTICS AND MECHATRONICS | 2022年 / 34卷 / 03期

关键词：

tactile sensor; MEMS; microcantilever; high sensitivity; ARRAY; CONTACT; FORCE;

D O I：

10.20965/jrm.2022.p0677

中图分类号：

TP24 [机器人技术];

学科分类号：

080202 ; 1405 ;

摘要：

We previously reported a microelectromechanical system tactile sensor with elastomer-embedded microcantilevers. The sensor enabled the gripping control of soft objects by a robotic hand and acquisition of the object surface texture data. However, sensitivity improvement for more precise control and better texture information acquisition is desired. Here, the cantilever size and the sensor's strain-gauge arrangement were redesigned, resulting in a sensor with significantly improved sensitivity. In addition, we report the sensitivity dependence on the cantilever size.

引用

页码：677 / 682

页数：6

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