The role of Cr interlayer in determining interfacial thermal conductance between Cu and diamond

被引:52
作者
Liu, Xiaoyan [1 ]
Sun, Fangyuan [2 ]
Wang, Luhua [1 ,3 ]
Wu, Zhixing [1 ]
Wang, Xitao [4 ,5 ]
Wang, Jinguo [3 ]
Kim, Moon J. [3 ]
Zhang, Hailong [1 ]
机构
[1] Univ Sci & Technol Beijing, State Key Lab Adv Met & Mat, Beijing 100083, Peoples R China
[2] Chinese Acad Sci, Inst Engn Thermophys, Beijing 100190, Peoples R China
[3] Univ Texas Dallas, Dept Mat Sci & Engn, Richardson, TX 75080 USA
[4] Qilu Univ Technol, Adv Mat Inst, Shandong Prov Key Lab High Strength Lightweight M, Shandong Acad Sci, Jinan 250014, Peoples R China
[5] Univ Sci & Technol Beijing, Collaborat Innovat Ctr Steel Technol, Beijing 100083, Peoples R China
基金
新加坡国家研究基金会; 中国国家自然科学基金;
关键词
Magnetron sputtering; Bilayer thin film; Interfacial thermal conductance; Auger electron spectroscopy; Time-domain thermoreflectance; CU/DIAMOND COMPOSITES; BOUNDARY CONDUCTANCE; COPPER/DIAMOND COMPOSITES; AUGER-SPECTRA; CARBIDE LAYER; CONDUCTIVITY; MICROSTRUCTURE; PARTICLES; COATINGS; AES;
D O I
10.1016/j.apsusc.2020.146046
中图分类号
O64 [物理化学(理论化学)、化学物理学];
学科分类号
070304 ; 081704 ;
摘要
Interfacial thermal conductance (h) plays a decisive role in attaining high thermal conductivity in diamond particles reinforced Cu matrix (Cu/diamond) composites for promising thermal management applications. In this article, Cu/Cr bilayer films were deposited onto a single-crystalline diamond substrate by magnetron sputtering to form a Cu/Cr/diamond sandwich structure to clarify the role of the Cr interlayer in determining h between Cu and diamond. The 50 nm-thick Cr film was deposited at 773 K with various lengths of holding time to regulate the transformation of Cr to Cr3C2. The h between Cu and diamond was experimentally measured by a timedomain thermoreflectance technique. The Cu/Cr/Cr3C2/diamond structure with a mixed Cr and Cr3C2 interlayer exhibits an h value of 168 MW/m(2)K, higher than 57 MW/m(2)K for the Cu/diamond structure, 96 MW/m(2)K for the Cu/Cr/diamond structure, and 86 MW/m(2)K for the Cu/Cr3C2 /diamond structure. The Cr interlayer improves the interfacial bonding and reduces the acoustic impedance mismatch between Cu and diamond; however, the full transformation of Cr to Cr3C2 reduces the h value due to lower thermal conductivity of Cr3C2 than Cr. This study provides guideline for interface modification to attain high thermal conductivity in Cu/diamond composites.
引用
收藏
页数:9
相关论文
共 64 条
[1]   Diamond-tungsten based coating-copper composites with high thermal conductivity produced by Pulse Plasma Sintering [J].
Abyzov, Andrey M. ;
Kruszewski, Miroslaw J. ;
Ciupinski, Lukasz ;
Mazurkiewicz, Marta ;
Michalski, Andrzej ;
Kurzydlowski, Krzysztof J. .
MATERIALS & DESIGN, 2015, 76 :97-109
[2]   Predictions of thermal boundary conductance for systems of disordered solids and interfaces [J].
Beechem, Thomas ;
Hopkins, Patrick E. .
JOURNAL OF APPLIED PHYSICS, 2009, 106 (12)
[3]   Towards a coherent database of thermal boundary conductance at metal/dielectric interfaces [J].
Blank, Maite ;
Weber, Ludger .
JOURNAL OF APPLIED PHYSICS, 2019, 125 (09)
[4]   Nanoscale thermal transport. II. 2003-2012 [J].
Cahill, David G. ;
Braun, Paul V. ;
Chen, Gang ;
Clarke, David R. ;
Fan, Shanhui ;
Goodson, Kenneth E. ;
Keblinski, Pawel ;
King, William P. ;
Mahan, Gerald D. ;
Majumdar, Arun ;
Maris, Humphrey J. ;
Phillpot, Simon R. ;
Pop, Eric ;
Shi, Li .
APPLIED PHYSICS REVIEWS, 2014, 1 (01)
[5]   Effect of Ti interlayer on interfacial thermal conductance between Cu and diamond [J].
Chang, Guo ;
Sun, Fangyuan ;
Duan, Jialiang ;
Che, Zifan ;
Wang, Xitao ;
Wang, Jinguo ;
Kim, Moon J. ;
Zhang, Hailong .
ACTA MATERIALIA, 2018, 160 :235-246
[6]   Interfacial characterization and thermal conductivity of diamond/Cu composites prepared by two HPHT techniques [J].
Chen, Hui ;
Jia, Chengchang ;
Li, Shangjie .
JOURNAL OF MATERIALS SCIENCE, 2012, 47 (07) :3367-3375
[7]   Polishing of polycrystalline diamond by the technique of dynamic friction. Part 2: Material removal mechanism [J].
Chen, Y. ;
Zhang, L. C. ;
Arsecularatne, J. A. .
INTERNATIONAL JOURNAL OF MACHINE TOOLS & MANUFACTURE, 2007, 47 (10) :1615-1624
[8]   Thermal conductance at atomically clean and disordered silicon/aluminum interfaces: A molecular dynamics simulation study [J].
Choi, Woon Ih ;
Kim, Kwiseon ;
Narumanchi, Sreekant .
JOURNAL OF APPLIED PHYSICS, 2012, 112 (05)
[9]   Thermal conductivity of SPS consolidated Cu/diamond composites with Cr-coated diamond particles [J].
Chu, Ke ;
Liu, Zhaofang ;
Jia, Chengchang ;
Chen, Hui ;
Liang, Xuebing ;
Gao, Wenjia ;
Tian, Wenhuai ;
Guo, Hong .
JOURNAL OF ALLOYS AND COMPOUNDS, 2010, 490 (1-2) :453-458
[10]   Design of interfacial Cr3C2 carbide layer via optimization of sintering parameters used to fabricate copper/diamond composites for thermal management applications [J].
Ciupinski, Lukasz ;
Kruszewski, Miroslaw J. ;
Grzonka, Justyna ;
Chmielewski, Marcin ;
Zielinsk, Radoslaw ;
Moszczynska, Dorota ;
Michalski, Andrzej .
MATERIALS & DESIGN, 2017, 120 :170-185