Sheath potential in the accelerating region of an electron-beam-excited plasma apparatus

被引：0
|
作者：
Miyano, R [1 ]
Izumi, S [1 ]
Kitada, R [1 ]
Fujii, M [1 ]
Ikezawa, S [1 ]
Ito, A [1 ]
机构：
[1] CKD LTD,CTR ENGN DEV,KOMAKI,AICHI 485,JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS | 1996年 / 35卷 / 2A期
关键词：
electron-beam-excited plasma apparatus; sheath potential; current balance equation; electron-energy-distribution function; electron-beam accelerating region;
D O I：
10.1143/JJAP.35.L174
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Recently, the decrease of sheath potential using a magnetic field has been used for the improvement of various apparatuses. With this in mind, the measured sheath potentials are quantitatively compared with the theoretical current balance equations at the sheath edge in the accelerating region using an electron-beam-excited plasma (EBEP) apparatus, where a strong beam exists. As a result, it is found that the radial profile of sheath potential depends on the beam potential (E'(b)) at the sheath edge in the plasma, and the axial profile on the beam potential (E(b)) and electron-beam temperature (T-b).
引用
收藏
页码：L174 / L177
页数：4
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