Accuracy and precision of position determination in ISTEM imaging of BaTiO3

被引：1

作者：

Marquardt, Dennis ^{[1
]}

Schowalter, Marco ^{[1
]}

Krause, Florian F. ^{[1
]}

Grieb, Tim ^{[1
]}

Mahr, Christoph ^{[1
]}

Mehrtens, Thorsten ^{[1
]}

Rosenauer, Andreas ^{[1
,2
]}

机构：

[1] Univ Bremen, Inst Festkorperphys, Otto Hahn Allee 1, D-28359 Bremen, Germany

[2] Univ Bremen, MAPEX Ctr Mat & Proc, Bibliotheksstr 1, D-28359 Bremen, Germany

来源：

ULTRAMICROSCOPY | 2021年 / 227卷

关键词：

TEM; CTEM; STEM; Tunnel junctions; BaTiO3; Atom position determination; Imaging scanning transmission electron  microscopy; FERROELECTRIC TUNNEL-JUNCTIONS; ELECTRON; RESOLUTION; INTERFACE;

D O I：

10.1016/j.ultramic.2021.113325

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

In this paper we study the effect of lens aberrations (spherical aberration and astigmatism), beam tilt, contamination and shot noise on the accuracy and precision of position determination in imaging scanning transmission electron microscopy (ISTEM) on the example of BaTiO3. ISTEM images are simulated as a function of sample thickness and defocus starting from a nearly perfect microscope setting. A defocus range was identified, in which atom column positions were reliably visible and could be decently measured. By averaging over this defocus and thickness range a figure of merit was defined and used to study the influence of above mentioned disturbing effects as a function of their strength. It turned out that column positions might become inaccurate, but distances are measured accurately. These were used to obtain recommendations for the experimental setup to measure the atomic arrangement that induces ferroelectric switching of BaTiO3.

引用

页数：8

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