TiO2 nanowires array fabrication and gas sensing properties

被引：137

作者：

Francioso, L. ^{[1
]}

Taurino, A. M. ^{[1
]}

Forleo, A. ^{[1
]}

Siciliano, P. ^{[1
]}

机构：

[1] CNR, IMM, Inst Microelect & Microsyst, I-73100 Lecce, Italy

来源：

SENSORS AND ACTUATORS B-CHEMICAL | 2008年 / 130卷 / 01期

关键词：

metal oxide nanowires; TiO2; nanometric patterning; response enhancement;

D O I：

10.1016/j.snb.2007.07.074

中图分类号：

O65 [分析化学];

学科分类号：

070302 ; 081704 ;

摘要：

A cheap nanofabrication process for titania (TiO2) polycrystalline nanowire array for gas sensing applications with lateral size ranging from 90 to 180 nm, and gas sensing characterizations are presented. Alternatively to typical pattern transfer techniques for submicron fabrication, authors focused on a standard 365 nm UV photolithographic process able to fabricate sol-gel nanostructured titania nanowires from a solid thin film. Main aim of present work is the experimental validation of enhanced gas sensing response of nanopatterned metal oxide thin film sensors. Two different kinds of gas sensor with nanopatterned sensitive area have been realized onto silicon substrates and tested towards different EtOH concentrations; experimental tests have been carried out with a contemporary output signals collection from a nanowires-based gas sensor and a second device with solid sensitive film without patterning, in order to validate effects of nanomachining on sensitive material response. (C) 2007 Elsevier B.V. All rights reserved.

引用

页码：70 / 76

页数：7

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