Geometrical characterization techniques for microlens made by thermal reflow of photoresist cylinder

被引：32

作者：

Ashraf, Mohammed ^{[1
]}

Gupta, Cherry ^{[3
]}

Chollet, Franck ^{[1
]}

Springham, Stuart Victor ^{[2
]}

Rawat, Rajdeep Singh ^{[2
]}

机构：

[1] Nanyang Technol Univ, Sch MAE, Micromachines Ctr, Singapore 639798, Singapore

[2] Nanyang Technol Univ, Natl Inst Educ, Singapore 637616, Singapore

[3] Delhi Coll Engn, Delhi, India

来源：

OPTICS AND LASERS IN ENGINEERING | 2008年 / 46卷 / 10期

关键词：

microlens; characterization; microscopy; SEM; confocal; fluorescence; profilometry;

D O I：

10.1016/j.optlaseng.2008.05.008

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

Microlens characterization is a prerequisite for improving fabrication process, and for satisfying the end user needs. In this paper we explore techniques to characterize geometrical properties of microlens made by thermal reflow: viz. microlens profile; radius of curvature; microlens height; contact angle and focal length. The geometrical characterization is done using techniques such as contact profilometry, scanning electron microscopy (SEM), optical microscopy, white light confocal microscopy and fluorescence confocal microscopy. All the above techniques are studied and compared, keeping in mind the characterization requirements of polymer microlens made by thermal reflow technique. (C) 2008 Elsevier Ltd. All rights reserved.

引用

页码：711 / 720

页数：10

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