Estimation of the electron beam-induced specimen heating and the emitted X-rays spatial resolution by Kossel microdiffraction in a scanning electron microscope

被引：17

作者：

Bouscaud, Denis ^{[1
]}

Pesci, Raphael ^{[1
]}

Berveiller, Sophie ^{[1
]}

Patoor, Etienne ^{[1
]}

机构：

[1] Arts & Metiers ParisTech, CNRS UMR 7239, LEM3, F-57078 Metz, France

来源：

ULTRAMICROSCOPY | 2012年 / 115卷

关键词：

Kossel microdiffraction; Scanning electron microscope; Lattice parameter; Specimen heating; X-rays spatial resolution;

D O I：

10.1016/j.ultramic.2012.01.018

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

A Kossel microdiffraction experimental setup has been developed inside a Scanning Electron Microscope for crystallographic orientation, strain and stress determination at a micrometer scale. This paper reports an estimation of copper and germanium specimens heating due to the electron beam bombardment. The temperature rise is calculated from precise lattice parameters measurement considering different currents induced in the specimens. The spatial resolution of the technique is then deduced. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：115 / 119

页数：5

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