Diagnostic of capacitively coupled radio frequency plasma by homogeneous discharge model

被引：17

作者：

Bora, B. ^{[1
]}

Bhuyan, H. ^{[1
]}

Favre, M. ^{[1
]}

Wyndham, E. ^{[1
]}

Chuaqui, H. ^{[1
]}

机构：

[1] Pontificia Univ Catolica Chile, Dept Fis, Santiago 22, Chile

来源：

PHYSICS LETTERS A | 2012年 / 376卷 / 16期

关键词：

Capacitively coupled radio frequency plasma; Plasma diagnostic; Homogeneous discharge model; Glow discharge plasma; Atmospheric pressure plasma jet; AIR;

D O I：

10.1016/j.physleta.2012.03.004

中图分类号：

O4 [物理学];

学科分类号：

0702 ;

摘要：

In this Letter, a plasma diagnostic technique is reported to evaluate the plasma parameters of capacitively coupled radio frequency argon plasma on the basis of homogeneous discharge model. The technique is implemented for wide range of operating pressure ranging from few mTorrs to atmospheric pressure. Considerable dependence of plasma parameters on the plasma series resonance effect and the drift velocity of the electron for low pressure plasma and on the ion density for atmospheric pressure plasma jet were observed. (C) 2012 Elsevier B.V. All rights reserved.

引用

页码：1356 / 1359

页数：4

共 28 条

[1]

[Anonymous], 2005, I PHYS PUBL, DOI DOI 10.1201/9781482269123

[2] Gas discharge plasmas and their applications [J].

Bogaerts, A ;

Neyts, E ;

Gijbels, R ;

van der Mullen, J .

SPECTROCHIMICA ACTA PART B-ATOMIC SPECTROSCOPY, 2002, 57 (04) :609-658

[3] Measurements of time average series resonance effect in capacitively coupled radio frequency discharge plasma [J].

Bora, B. ;

Bhuyan, H. ;

Favre, M. ;

Wyndham, E. ;

Chuaqui, H. ;

Kakati, M. .

PHYSICS OF PLASMAS, 2011, 18 (10)

[4] Variation of axial and radial temperature in an expanded thermal plasma jet [J].

Bora, B. ;

Kakati, M. ;

Das, A. K. .

JOURNAL OF PLASMA PHYSICS, 2010, 76 :699-707

[5] Self-excited nonlinear plasma series resonance oscillations in geometrically symmetric capacitively coupled radio frequency discharges [J].

Donko, Z. ;

Schulze, J. ;

Czarnetzki, U. ;

Luggenhoelscher, D. .

APPLIED PHYSICS LETTERS, 2009, 94 (13)

[6] Coaxial rf atmospheric pressure dielectric barrier air-helium plasma characteristics [J].

Gulec, A. ;

Oksuz, L. ;

Hershkowitz, N. .

PHYSICS LETTERS A, 2011, 375 (16) :1733-1736

[7]

Heald M.A., 1965, PLASMA DIAGNOSTIC MI

[8] rf plasma oxidation of Ni thin films sputter deposited to generate thin nickel oxide layers [J].

Hoey, Megan L. ;

Carlson, J. B. ;

Osgood, R. M., III ;

Kimball, B. ;

Buchwald, W. .

APPLIED PHYSICS LETTERS, 2010, 97 (15)

[9]

Huddlestone R.H., 1965, Plasma Diagnostic Techniques

[10] Discharge characteristics of an atmospheric-pressure capacitively coupled radio-frequency argon plasmas [J].

Li, Shou-Zhe ;

Lim, Jin-Pyo ;

Uhm, Han S. .

PHYSICS LETTERS A, 2006, 360 (02) :304-308

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