Atomic Force Microscopy using Optical Pickup Head to Measure Cantilever Displacement

被引：0

作者：

Lee, Sang-Heon ^{[2
]}

Kim, Hyun-Chul ^{[2
]}

Jung, Kwang-Suk ^{[1
]}

机构：

[1] Chungju Natl Univ, Dept Mech Engn, Chungju Si 380702, Chungbuk, South Korea

[2] Andong Natl Univ, Dept Mech Design Engn, Andong Si 746760, Kyungbuk, South Korea

来源：

INTERNATIONAL JOURNAL OF PRECISION ENGINEERING AND MANUFACTURING | 2011年 / 12卷 / 05期

关键词：

Optical pickup head; Atomic force microscopy; Scanning probe microscopy; DISK PICKUP;

D O I：

10.1007/s12541-011-0122-8

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

We constructed an optical pickup head atomic force microscope (OPH-AFM). The component used to monitor the displacement of the cantilever is made from the optical pickup head of a commercial DVD-ROM. In contrast to previous trials using an optical pickup head, this OPH-AFM provides a direct view of the cantilever and the sample. Therefore, the preliminary imaging process, including placing the laser beam on the cantilever and setting the initial scanning position over the sample, is straightforward. The OPH-AFM showed vertical resolution of below 20 nm, which is close to the maximum performance of the related hardware.

引用

页码：913 / 915

页数：3

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