Structure and Properties of Cr-Containing Hydrogenated Amorphous Carbon Films Synthesized by Filtered Cathodic Vacuum Arc System

被引：4

作者：

Gou, Wei ^{[1
]}

Chu, Xinpu ^{[1
]}

Li, Guoqing ^{[1
]}

机构：

[1] Dalian Univ Technol, State Key Lab Mat Modificat Laser Ion & Electron, Dalian 116024, Peoples R China

来源：

PLASMA PROCESSES AND POLYMERS | 2007年 / 4卷

关键词：

diamond-like carbon (DLC); filtered cathodic vacuum arc system; metal-containing coatings; microhardness; microstructure;

D O I：

10.1002/ppap.200730715

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

A series of Cr-containing diamond-like carbon films (Cr-DLC) have been successfully deposited at various C2H2 flow rates by filtered cathodic vacuum arc system. The composition, structure, and properties of Cr-DLC films were investigated by SEM, EPMA, XRD, Raman spectra, and nanoindentation. It is shown that the content of Cr increases from 29.1 to 49.3 at.-%, and the C/Cr increases from 1 to 2.5, when the C2H2 flow rate decrease from 30 to 10 sccm. The structure of Cr-DLC films was Cr-containing amorphous carbon films, and with increase in C2H2 flow rate, the G site and the I-D/I-G ratio decrease, and more sp(3) bonding is formed. According to nanoindentation test, the hardness and elastic modulus of Cr-DLC films increase from 10 and 124 GPa to 14 and 198 GPa with decreasing of C2H2 flow rate, respectively.

引用

页码：S269 / S272

页数：4

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