Hole free phase plate tomography for materials sciences samples

被引：6

作者：

Hayashida, Misa ^{[1
]}

Cui, Kai ^{[1
]}

Najarian, Amin Morteza ^{[2
]}

McCreery, Richard ^{[1
,2
]}

Jehanathan, Neerushana ^{[3
]}

Pawlowicz, Chris ^{[3
]}

Motoki, Sohei ^{[4
]}

Kawasaki, Masahiro ^{[5
,7
]}

Konyuba, Yuji ^{[4
]}

Malac, Marek ^{[1
,6
]}

机构：

[1] NRC NANO, 11421 Saskatchewan Dr, Edmonton, AB T6G 2M9, Canada

[2] Univ Alberta, Dept Chem, Edmonton, AB T6G 2G2, Canada

[3] Techlnsights, 1891 Robertson Rd 500, Nepean, ON K2H 5B7, Canada

[4] JEOL Ltd, 3-1-2 Musashino, Tokyo 1968558, Japan

[5] JEOL USA Inc, 11 Dearborn Rd, Peabody, MA 01960 USA

[6] Univ Alberta, Dept Phys, Edmonton, AB T6G 2E1, Canada

[7] Appl Mat Inc, 330 Scott Blvd, Santa Clara, CA USA

来源：

MICRON | 2019年 / 116卷

关键词：

Hole free phase plate (HFPP); Electron tomography; Transistor imaging; Molecular electronic junction; Interface roughness; Transmission electron microscope (TEM);

D O I：

10.1016/j.micron.2018.09.005

中图分类号：

TH742 [显微镜];

学科分类号：

摘要：

We report, for the first time, the three dimensional reconstruction (3D) of a transistor from a microprocessor chip and roughness of molecular electronic junction obtained by electron tomography with Hole Free Phase Plate (HFPP) imaging. The HFPP appears to enhance contrast between inorganic materials and also increase the visibility of interfaces between different materials. We demonstrate that the degree of enhancement varies depending on material and thickness of the samples using experimental and simulation data.

引用

页码：54 / 60

页数：7

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