The pH Sensing Properties of RF Sputtered RuO2 Thin-Film Prepared Using Different Ar/O2 Flow Ratio

被引：39

作者：

Sardarinejad, Ali ^{[1
]}

Maurya, Devendra Kumar ^{[1
]}

Alameh, Kamal ^{[1
]}

机构：

[1] Edith Cowan Univ, Elect Sci Res Inst, Joondalup, WA 6027, Australia

来源：

MATERIALS | 2015年 / 8卷 / 06期

关键词：

thin film; sputtering; metal oxide; pH sensing; electrochemical properties; RUTHENIUM DIOXIDE; OXIDE-FILMS; ELECTRODES; SENSORS;

D O I：

10.3390/ma8063352

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The influence of the Ar/O-2 gas ratio during radio frequency (RF) sputtering of the RuO2 sensing electrode on the pH sensing performance is investigated. The developed pH sensor consists in an RF sputtered ruthenium oxide thin-film sensing electrode, in conjunction with an electroplated Ag/AgCl reference electrode. The performance and characterization of the developed pH sensors in terms of sensitivity, response time, stability, reversibility, and hysteresis are investigated. Experimental results show that the pH sensor exhibits super-Nernstian slopes in the range of 64.33-73.83 mV/pH for Ar/O-2 gas ratio between 10/0-7/3. In particular, the best pH sensing performance, in terms of sensitivity, response time, reversibility and hysteresis, is achieved when the Ar/O-2 gas ratio is 8/2, at which a high sensitivity, a low hysteresis and a short response time are attained simultaneously.

引用

页码：3352 / 3363

页数：12

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