Enhancement of line X-ray emission from iron plasma created by laser irradiation of porous targets

被引：11

作者：

Fazeli, R. ^{[1
]}

Mahdieh, M. H. ^{[1
]}

Tallents, G. J. ^{[2
]}

机构：

[1] Iran Univ Sci & Technol, Dept Phys, Tehran, Iran

[2] Univ York, Dept Phys, York YO10 5DD, N Yorkshire, England

来源：

LASER AND PARTICLE BEAMS | 2011年 / 29卷 / 02期

关键词：

Laser plasmas; line X-ray emission; porous target; COLLISIONALLY-PUMPED LASER; PHOTOELECTRON-SPECTROSCOPY; ALUMINUM PLASMA; PULSES; LITHOGRAPHY; TRANSITIONS; ABSORPTION; EFFICIENT; CR; FE;

D O I：

10.1017/S0263034611000164

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Enhancement of the line X-ray emission from iron plasma is investigated by simulating laser irradiation of both porous and solid targets. Spectral line intensities are calculated for selected lines of the iron plasma within the extreme ultra-violet lithography wavelength range 13.3-13.7 nm. The calculations show that X-ray yield in porous targets can be enhanced significantly in comparison with solid density targets. The results also show that for specified conditions of the driving laser, there are optimums conditions of the porous target in which maximum yield can be obtained.

引用

页码：193 / 200

页数：8

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