Techniques for combinatorial molecular beam epitaxy

被引：27

作者：

Tsui, F ^{[1
]}

He, L ^{[1
]}

机构：

[1] Univ N Carolina, Dept Phys & Astron, Chapel Hill, NC 27599 USA

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2005年 / 76卷 / 06期

基金：

美国国家科学基金会;

关键词：

D O I：

10.1063/1.1905967

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

Basic considerations for implementing combinatorial approach to molecular beam epitaxy (MBE) are discussed, focusing on the key issues relevant to conventional MBE synthesis using solid sources and characterization. The primary objective for implementing combinatorial approach is to make MBE do more, more able to carry out controlled and systematic work in large parameter space, without sacrificing any existing capabilities of conventional MBE. Methods for accomplishing this by integrating current instrumentation technology are described. (c) 2005 American Institute of Physics.

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