Surface Form Measurement Using Single Shot Off-axis Fizeau Interferometry

被引：22

作者：

Abdelsalam, Dahi Ghareab ^{[1
,2
]}

Baek, Byung Joon ^{[1
]}

Cho, Yong Jai ^{[3
]}

Kim, Daesuk ^{[1
]}

机构：

[1] Chonbuk Natl Univ, Div Mech Syst Engn, Jeonju 561756, South Korea

[2] Natl Inst Stand, Engn & Surface Metrol Lab, El Haram, El Giza, Egypt

[3] Korea Res Inst Stand & Sci, Adv Technol Div, Taejon 305340, South Korea

来源：

JOURNAL OF THE OPTICAL SOCIETY OF KOREA | 2010年 / 14卷 / 04期

关键词：

Fizeau interferometer; Phase shifting; Off-axis geometry; Numerical reconstruction; PHASE-SHIFTING INTERFEROMETRY; ACOUSTOOPTIC TUNABLE FILTER; FRINGE-PATTERN-ANALYSIS; HOLOGRAPHIC MICROSCOPY; DIGITAL HOLOGRAPHY; FOURIER-TRANSFORM; PROFILE;

D O I：

10.3807/JOSK.2010.14.4.409

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

This paper describes the surface form measurement of a spherical smooth surface by using single shot off-axis Fizeau interferometry. The demodulated phase map is obtained and unwrapped to remove the 2 pi ambiguity. The unwrapped phase map is converted to height and the 3D surface height of the surface object is reconstructed. The results extracted from the single shot off-axis geometry are compared with the results extracted from four-frame phase shifting in-line interferometry, and the results are in excellent agreement.

引用

页码：409 / 414

页数：6

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