A study on surface polishing of SiC with a tribochemical reaction mechanism

被引：43

作者：

Lin, YC ^{[1
]}

Kao, CH ^{[1
]}

机构：

[1] Natl Taiwan Univ Sci & Technol, Dept Mech Engn, Taipei 10660, Taiwan

来源：

INTERNATIONAL JOURNAL OF ADVANCED MANUFACTURING TECHNOLOGY | 2005年 / 25卷 / 1-2期

关键词：

Si-based ceramics; surface damage; tribochemical reaction;

D O I：

10.1007/s00170-003-1873-x

中图分类号：

TP [自动化技术、计算机技术];

学科分类号：

0812 ;

摘要：

This work investigates the surface polishing of silicon carbide SiC using the tribochemical reaction mechanism. Different metal discs-cast iron, AISI 304 stainless steel, S45C medium carbon steel plated chromium, brass and copper-are used to polish SiC in water and kerosene, respectively. The experimental results show that ferrous metal discs can effectively polish SiC in water. Also, no surface damage or scratches on the polished surface of SiC are observed by this method. The polishing debris was analyzed by electron spectroscopy for chemical analysis. The analyzed results indicate that the polishing surface of SiC is removed tribochemically with the aid of catalytic effect of iron oxide. Moreover, in this process the maximum material removal rate is about 0.06 mum/h.

引用

页码：33 / 40

页数：8

共 19 条

[1]

ANDERSON P, WEAR, V154, P37

[2] INTERACTION OF TRIBOCHEMISTRY AND MICROFRACTURE IN THE FRICTION AND WEAR OF SILICON-NITRIDE [J].

FISCHER, TE ;

TOMIZAWA, H .

WEAR, 1985, 105 (01) :29-45

[3] Tribochemical polishing of silicon nitride [J].

Hah, SR ;

Fischer, TE .

JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1998, 145 (05) :1708-1714

[4] DAMAGE-FREE TRIBOCHEMICAL POLISHING OF DIAMOND AT ROOM-TEMPERATURE - A FINISHING TECHNOLOGY [J].

HAISMA, J ;

VANDERKRUIS, FJHM ;

SPIERINGS, BACM ;

OOMEN, JM ;

FEY, FMJG .

PRECISION ENGINEERING-JOURNAL OF THE AMERICAN SOCIETY FOR PRECISION ENGINEERING, 1992, 14 (01) :20-27

[5]

Iler R.K., 1979, The chemistry of silica

[6] Tribochemical wear theory of non-oxide ceramics in high-temperature and high-pressure water [J].

Kitaoka, S ;

Tsuji, T ;

Yamaguchi, Y ;

Kashiwagi, K .

WEAR, 1997, 205 (1-2) :40-46

[7] TRIBOLOGICAL CHARACTERISTICS OF SIC CERAMICS IN HIGH-TEMPERATURE AND HIGH-PRESSURE WATER [J].

KITAOKA, S ;

TSUJI, T ;

KATOH, T ;

YAMAGUCHI, Y ;

KASHIWAGI, K .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (07) :1851-1856

[8] TRIBOLOGICAL CHARACTERISTICS OF SI3N4, CERAMIC IN HIGH-TEMPERATURE AND HIGH-PRESSURE WATER [J].

KITAOKA, S ;

TSUJI, T ;

KATOH, T ;

YAMAGUCHI, Y ;

SATO, K .

JOURNAL OF THE AMERICAN CERAMIC SOCIETY, 1994, 77 (02) :580-588

[9] MECHANOCHEMICAL SUPERPOLISHING OF DIAMOND USING NANO3 OR KNO3 AS OXIDIZING-AGENTS [J].

KUHNLE, J ;

WEIS, O .

SURFACE SCIENCE, 1995, 340 (1-2) :16-22

[10] SLIDING FRICTION AND WEAR OF CERAMICS IN NEUTRAL, ACID AND BASIC AQUEOUS-SOLUTIONS [J].

LOFFELBEIN, B ;

WOYDT, M ;

HABIG, KH .

WEAR, 1993, 162 :220-228

← 1 2 →