Design, fabrication and characterization of SAW pressure sensors for offshore oil and gas exploration

被引：28

作者：

Della Lucia, F. ^{[1
,2
]}

Zambrozi, P., Jr. ^{[1
,2
]}

Frazatto, F. ^{[1
]}

Piazzetta, M. ^{[1
]}

Gobbi, A. ^{[1
]}

机构：

[1] Brazilian Natl Ctr Mat & Energy Res, Brazilian Natl Nanotechnol Lab, BR-13083970 Campinas, SP, Brazil

[2] Univ Estadual Campinas, Sch Elect & Comp Engn, BR-13083852 Campinas, SP, Brazil

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2015年 / 222卷

关键词：

Surface Acoustic Wave; Two-port resonators; Quartz resonators; High pressure sensors; Quartz; High pressure measurements;

D O I：

10.1016/j.sna.2014.12.011

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

This work shows the design, development and measurements of an innovative pressure sensor for high pressure and high temperature environments for offshore oil and gas exploration. The proposed sensor is produced with a simple microfabrication process, which enables large-scale manufacturing, reducing production costs. The advantage of low cost production using these sensors is the ability to design distributed pressure sensors systems at affordable prices to monitor smart wells in oil and gas production. The proposed sensor consists of a two-port SAW device in contrast to the common BAW pressure sensors typically used in the oil and gas industry. A test capsule was designed to measure the device under pressure and the sensitivity obtained by the measurements was found to be 14.8 Hz/psi. The operation range was 0-15,000 psi and the device must operate on temperatures up to 150 C. Resolution was determined to be 1% of full scale. A capsule to package the sensor and circuits was designed and manufactured in 316L Stainless Steel. Results are very promising and expand the application of different kinds of sensors in the oil and gas industry. (C) 2014 Elsevier B.V. All rights reserved.

引用

页码：322 / 328

页数：7

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