Low temperature growth of carbon nanotubes on glass substrate through the thermal chemical vapor deposition method using a binary catalyst system

被引：0

作者：

Kuo, Min-Lian ^{[1
]}

Tsai, Tsung-Yen ^{[1
]}

Tai, Nyan-Hwa ^{[1
]}

Chan, Lih-Hsiung ^{[2
]}

Chen, Kuang-Chung ^{[2
]}

Chang, Yu-Yang ^{[2
]}

机构：

[1] Natl Tsing Hua Univ, Dept Mat Sci & Engn, Hsinchu 300, Taiwan

[2] Ind Technol Res Inst, Display Technol Ctr, Display & Lighting Integrat Dept, Hsinchu 310, Taiwan

来源：

IDMC'07: PROCEEDINGS OF THE INTERNATIONAL DISPLAY MANUFACTURING CONFERENCE 2007 | 2007年

关键词：

D O I：

暂无

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

Carbon nanotubes (CNTs) were synthesized on glass substrates at low temperature (550 degrees C) using binary catalyst Co/Ti. This method is applicable to the preparation of large area field emission devices. It is found that the Ti layer thickness influences the Co reactivity, which enhances growth of CNTs at relatively low temperature of 550 degrees C. Growth of CNTs was also affected by the precursor flux. In this study, different flow fields were adopted by changing the height of the quartz boat in the tube furnace during CNT growth. Furthermore, the field emission properties of the devices fabricated under different conditions were also measured.

引用

页码：614 / +

页数：2

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