Dynamics of a canonical electrostatic MEMS/NEMS system

被引：20

作者：

Ai, Shangbing ^{[1
]}

Pelesko, John A. ^{[2
]}

机构：

[1] Univ Alabama, Dept Math Sci, Huntsville, AL 35899 USA

[2] Univ Delaware, Dept Math Sci, Newark, DE 19716 USA

来源：

JOURNAL OF DYNAMICS AND DIFFERENTIAL EQUATIONS | 2008年 / 20卷 / 03期

关键词：

MEMS; nanotechnology; electrostatics; periodic solutions; saddle-node bifurcation; shooting method;

D O I：

10.1007/s10884-007-9094-x

中图分类号：

O29 [应用数学];

学科分类号：

070104 ;

摘要：

The mass-spring model of electrostatically actuated microelectromechanical systems (MEMS) or nanoelectromechanical systems (NEMS) is pervasive in the MEMS and NEMS literature. Nonetheless a rigorous analysis of this model does not exist. Here periodic solutions of the canonical mass-spring model in the viscosity dominated time harmonic regime are studied. Ranges of the dimensionless average applied voltage and dimensionless frequency of voltage variation are delineated such that periodic solutions exist. Parameter ranges where such solutions fail to exist are identified; this provides a dynamic analog to the static "pull-in" instability well known to MEMS/NEMS researchers.

引用

页码：609 / 641

页数：33

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