Investigating the thermal stability of the chemical vapour deposited zirconium carbide layers

被引：10

作者：

Biira, Saphina ^{[1
]}

Thabethe, T. T. ^{[2
]}

Hlatshwayo, T. T. ^{[2
]}

Bissett, H. ^{[3
]}

Ntsoane, T. ^{[3
]}

Malherbe, J. B. ^{[2
]}

机构：

[1] Busitema Univ, Dept Phys, Tororo, Uganda

[2] Univ Pretoria, Dept Phys, Pretoria, South Africa

[3] South African Nucl Energy Corp, Pretoria, South Africa

来源：

JOURNAL OF ALLOYS AND COMPOUNDS | 2020年 / 834卷

关键词：

Annealing temperature; Chemical vapour deposition; ZrC layers; Microstructural properties; Surface morphology; RAMAN-SPECTROSCOPY; GRAIN-GROWTH; EVOLUTION; ZRC; MICROSTRUCTURE; PARTICLES; FILMS;

D O I：

10.1016/j.jallcom.2020.155003

中图分类号：

O64 [物理化学（理论化学）、化学物理学];

学科分类号：

070304 ; 081704 ;

摘要：

The effect of thermal treatment on zirconium carbide (ZrC) layers deposited by chemical vapour deposition process was investigated using X-ray diffraction (XRD), Raman spectroscopy, nanoindention and scanning electron microscopy (SEM). The ZrC layers deposited at 1400 degrees C (composed of 96% ZrC and 4% C) were annealed at 1500, 1600, 1700 and 1800 degrees C for 2 h under high vacuum of 2.6 x 10(-7) mbar. After annealing, the lattice constant and the average crystallite sizes were found to increase whereas the lattice strain and dislocation density decreased. The preferred orientation of the as-deposited layers was (220); it changed to (200) when annealed at 1500 degrees C and 1600 degrees C. At annealing temperature of 1700 degrees C and 1800 degrees C, the preferred orientation was (220) just like for the as-deposited ZrC layers. From Raman spectroscopy analysis, the I-D/I-G ratio reduced from 0.694 to 0.414 with annealing temperature indicating an improvement in crystallinity level and a decrease in the defects in the carbon material in the ZrC layers. The hardness of the layers was found to decrease slightly with annealing temperature from 26.4 +/- 0.6 GPa to 21.3 +/- 0.5 GPa. Some voids initially present in the as-deposited ZrC layers closed up and particles increased in size with annealing temperature. (C) 2020 Elsevier B.V. All rights reserved.

引用

页数：9

共 39 条

[1]

Aksoy Seval, 2010, Advances in Control, Chemical Engineering, Civil Engineering and Mechanical Engineering. European Conference of Chemical Engineering (ECCE 2010). European Conference of Civil Engineering (ECCIE 2010) European Conference of Mechanical Engineering (ECME 2010). European Conference of Control (ECC 2010), P227

[2]

[Anonymous], TOPAS VERS 4 2

[3] Design and fabrication of a chemical vapour deposition system with special reference to ZrC layer growth characteristics [J].