Measurements of piezoelectric properties of ferroelectric thick films by fotonic sensor

被引：3

作者：

Vyshatko, NP ^{[1
]}

Brioso, PM

Pérez, J

Vilarinho, PM

Kholkin, AL

机构：

[1] Univ Aveiro, Dept Ceram & Glass Engn, P-3810193 Aveiro, Portugal

[2] Univ Aveiro, Ctr Res Ceram & Composite Mat, P-3810193 Aveiro, Portugal

来源：

FERROELECTRICS | 2005年 / 320卷

关键词：

Fotonic Sensor; piezoelectric effect; thick film;

D O I：

10.1080/00150190590967035

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

A development of method of piezoelectric measurements of thick film and bulk samples by a commercially available Fotonic Sensor (TM) is reported. The main problem of using this technique is a high requirement to the electrode quality and an overestimation of the piezoelectric coefficicnts due to bending effects. In this work, both problems were successfully solved by using special mechanical interface (cantilever beam) that transfers mechanical displacement from the moving piezoelectric surface to the mirror. The capabilities of the piezoelectric measurement setup are validated by the measuretnents in both bulk ceramics and thick Pb(Zr.Ti)O-3 films.

引用

页码：639 / 646

页数：8

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