Fabrication for multilayered composite thin films by dual-channel vacuum arc deposition

被引：2

作者：

Dai, Hua ^{[1
]}

Shen, Yao ^{[1
]}

Wang, Jing ^{[1
]}

Xu, Ming ^{[2
]}

Li, Liuhe ^{[2
,3
]}

Li, Xiaoling ^{[1
]}

Cai, Xun ^{[1
]}

Chu, Paul K. ^{[2
]}

机构：

[1] Shanghai Jiao Tong Univ, Shanghai Key Lab Mat Laser Proc & Modificat, Sch Mat Sci & Engn, Shanghai 200240, Peoples R China

[2] City Univ Hong Kong, Dept Phys & Mat Sci, Kowloon, Hong Kong, Peoples R China

[3] Beijing Univ Aeronaut & Astronaut, Dept 702, Sch Mech Engn & Automat, Beijing 100083, Peoples R China

来源：

REVIEW OF SCIENTIFIC INSTRUMENTS | 2008年 / 79卷 / 06期

基金：

中国国家自然科学基金;

关键词：

D O I：

10.1063/1.2937195

中图分类号：

TH7 [仪器、仪表];

学科分类号：

0804 ; 080401 ; 081102 ;

摘要：

A flexible dual-channel curvilinear electromagnetic filter has been designed and constructed to fabricate multilayered composite films in vacuum arc ion plating. The filter possesses two guiding channels and one mixing unit. Multilayered TiN/AlN and TiAlN composite films can be produced by controlling the frequency or interval of the two cathodes. The x-ray photoelectron spectroscopy and low-angle x-ray diffraction results reveal the periodic Ti and Al structures in the TiN/AlN films. The TiAlN films exhibit a smooth surface morphology confirming effective filtering of macroparticles by the filter. High temperature oxidation conducted at 700 degrees C for an hour indicates that the weight increment in the TiAlN films produced by the dual filter is only half of that of the TiAlN films produced without a filter, thereby showing better resistance against surface oxidation. (c) 2008 American Institute of Physics.

引用

页数：5

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