Controlled shift in emission wavelength from patterned porous silicon using focused ion beam irradiation

被引:10
作者
Mangaiyarkarasi, D [1 ]
Teo, EJ
Breese, MBH
Bettiol, AA
Blackwood, DJ
机构
[1] Natl Univ Singapore, Ctr Ion Beam Applicat, Dept Phys, Singapore 117542, Singapore
[2] Natl Univ Singapore, Dept Mat Sci, Singapore 117542, Singapore
关键词
D O I
10.1149/1.2032347
中图分类号
O646 [电化学、电解、磁化学];
学科分类号
081704 ;
摘要
Photoluminescence images containing several distinct color emissions, from green to red, have been obtained using high-energy focused ion beam irradiation, in conjunction with metal-aided anodization of 4 Omega cm p-type silicon. The ion irradiation increases the local resistivity in a controlled manner resulting in smaller hole currents flow through the irradiated areas. This causes a controlled redshift of up to 200 nm in the photoluminescence emission, which in terms of the quantum confinement model would correlate to larger nanocrystallites forming in the irradiated region. (c) 2005 The Electrochemical Society.
引用
收藏
页码:D173 / D176
页数:4
相关论文
共 29 条
[1]   Integrated porous-silicon light-emitting diodes: A fabrication process using graded doping profiles [J].
Barillaro, G ;
Diligenti, A ;
Pieri, F ;
Fuso, F ;
Allegrini, M .
APPLIED PHYSICS LETTERS, 2001, 78 (26) :4154-4156
[2]  
Birner A, 2001, ADV MATER, V13, P377, DOI 10.1002/1521-4095(200103)13:6<377::AID-ADMA377>3.0.CO
[3]  
2-X
[4]   Patterning of porous silicon by electron-beam lithography [J].
Borini, S ;
Rossi, AM ;
Boarino, L ;
Amato, G .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 2003, 150 (05) :G311-G313
[5]   SILICON QUANTUM WIRE ARRAY FABRICATION BY ELECTROCHEMICAL AND CHEMICAL DISSOLUTION OF WAFERS [J].
CANHAM, LT .
APPLIED PHYSICS LETTERS, 1990, 57 (10) :1046-1048
[6]   Tunable, narrow, and directional luminescence from porous silicon light emitting devices [J].
Chan, S ;
Fauchet, PM .
APPLIED PHYSICS LETTERS, 1999, 75 (02) :274-276
[7]   Quantum confinement contribution to porous silicon photoluminescence spectra [J].
Cooke, DW ;
Muenchausen, RE ;
Bennett, BL ;
Jacobsohn, LG ;
Nastasi, M .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (01) :197-203
[8]   The structural and luminescence properties of porous silicon [J].
Cullis, AG ;
Canham, LT ;
Calcott, PDJ .
JOURNAL OF APPLIED PHYSICS, 1997, 82 (03) :909-965
[9]   LUMINESCENT COLOR IMAGE GENERATION ON POROUS SILICON [J].
DOAN, VV ;
SAILOR, MJ .
SCIENCE, 1992, 256 (5065) :1791-1792
[10]   ENHANCEMENT AND SUPPRESSION OF THE FORMATION OF POROUS SILICON [J].
DUTTAGUPTA, SP ;
PENG, C ;
FAUCHET, PM ;
KURINEC, SK ;
BLANTON, TN .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1995, 13 (03) :1230-1235