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Effects of substrate temperature on the physical properties of strained BaTiO3/LaNiO3 artificial superlattices
被引:20
|作者:
Liang, YC
[1
]
Liang, YC
[1
]
机构:
[1] Chien Kuo Technol Univ, Dept Mech Engn, Changhua 500, Taiwan
[2] Natl Synchrotron Radiat Res Ctr, Hsinchu 300, Taiwan
关键词:
surface structure;
superlattices;
perovskites;
dielectric materials;
D O I:
10.1016/j.jcrysgro.2005.08.034
中图分类号:
O7 [晶体学];
学科分类号:
0702 ;
070205 ;
0703 ;
080501 ;
摘要:
An artificially layered perovskite composed of dielectric BaTiO3 (BTO) and conductive LaNiO3 (LNO) was grown on a LaNiO3-coated SrTiO3 (0 0 1) single crystal substrate by a radio-frequency magnetron sputtering system. The cross-sectional image of transmission electron microscopy confirmed the formation of BTO/LNO superlattice structure. Moreover, the clearly main feature and satellite features from the (0 0 L) Bragg reflection of X-ray indicate the high quality of the BTO/LNO superlattice structure was formed on a LaNiO3-coated SrTiO3 substrate. All the superlatttice films deposited at 300-550 degrees C show a significant enhancement of dielectric constant relative to the BTO single epilayer of the same effective thickness; the higher is the deposition temperature, the larger is the dielectric constant of the films present. (c) 2005 Elsevier B.V. All rights reserved.
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页码:345 / 351
页数:7
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