High Performance Indium-Gallium-Zinc Oxide Thin Film Transistor via Interface Engineering

被引:40
作者
Zhao, Yepin [1 ,2 ]
Wang, Zhengxu [1 ,2 ]
Xu, Guangwei [1 ,2 ,3 ]
Cai, Le [1 ,2 ]
Han, Tae-Hee [1 ,2 ,4 ]
Zhang, Anni [1 ,2 ]
Wu, Quantan [1 ,2 ]
Wang, Rui [1 ,2 ]
Huang, Tianyi [1 ,2 ]
Cheng, Pei [1 ,2 ]
Chang, Sheng-Yung [1 ,2 ]
Bao, Daqian [1 ,2 ]
Zhao, Zhiyu [1 ,2 ]
Wang, Minhuan [1 ,2 ]
Huang, Yijie [1 ,2 ]
Yang, Yang [1 ,2 ]
机构
[1] Univ Calif Los Angeles, Dept Mat Sci & Engn, Los Angeles, CA 90095 USA
[2] Univ Calif Los Angeles, Calif Nano Syst Inst, Los Angeles, CA 90095 USA
[3] Univ Sci & Technol China, Sch Microelect, Hefei 230026, Anhui, Peoples R China
[4] Hanyang Univ, Div Mat Sci & Engn, Seoul 04763, South Korea
关键词
bi-functional acid modification; contact resistance; indium-gallium-zinc-oxide; solution-processed transistors; thin film transistors; DEPOSITION; COBALT;
D O I
10.1002/adfm.202003285
中图分类号
O6 [化学];
学科分类号
0703 ;
摘要
Solution-processed indium-gallium-zinc oxide (IGZO) thin film transistors (TFTs) have become well known in recent decades for their promising commercial potential. However, the unsatisfactory performance of small-sized IGZO TFTs is limiting their applicability. To address this issue, this work introduces an interface engineering method of bi-functional acid modification to regulate the interfaces between electrodes and the channels of IGZO TFTs. This method increases the interface oxygen vacancy concentration and reduces the surface roughness, resulting in higher mobility and enhanced contact at the interfaces. The TFT devices thus treated display contact resistance reduction from 9.1 to 2.3 k omega mm, as measured by the gated four-probe method, as well as field-effect mobility increase from 1.5 to 4.5 cm(2)(V s)(-1). Additionally, a 12 x 12 organic light emitting diode display constructed using the acid modified IGZO TFTs as switching and driving elements demonstrate the applicability of these devices.
引用
收藏
页数:6
相关论文
共 38 条
[21]   A Review for Compact Model of Thin-Film Transistors (TFTs) [J].
Lu, Nianduan ;
Jiang, Wenfeng ;
Wu, Quantan ;
Geng, Di ;
Li, Ling ;
Liu, Ming .
MICROMACHINES, 2018, 9 (11)
[22]   Processing, Structure, and Transistor Performance: Combustion versus Pulsed Laser Growth of Amorphous Oxides [J].
Moffitt, Stephanie L. ;
Stallings, Katie L. ;
Falduto, Allison F. ;
Lee, Woongkyu ;
Buchholz, D. Bruce ;
Wang, Binghao ;
Ma, Qing ;
Chang, Robert P. H. ;
Marks, Tobin J. ;
Bedzyk, Michael J. .
ACS APPLIED ELECTRONIC MATERIALS, 2019, 1 (04) :548-557
[23]   Room-temperature fabrication of transparent flexible thin-film transistors using amorphous oxide semiconductors [J].
Nomura, K ;
Ohta, H ;
Takagi, A ;
Kamiya, T ;
Hirano, M ;
Hosono, H .
NATURE, 2004, 432 (7016) :488-492
[24]   Improvements in the device characteristics of amorphous indium gallium zinc oxide thin-film transistors by Ar plasma treatment [J].
Park, Jin-Seong ;
Jeong, Jae Kyeong ;
Mo, Yeon-Gon ;
Kim, Hye Dong ;
Kim, Sun-Il .
APPLIED PHYSICS LETTERS, 2007, 90 (26)
[25]   Gated four-probe measurements on pentacene thin-film transistors: Contact resistance as a function of gate voltage and temperature [J].
Pesavento, PV ;
Chesterfield, RJ ;
Newman, CR ;
Frisbie, CD .
JOURNAL OF APPLIED PHYSICS, 2004, 96 (12) :7312-7324
[26]   Metal oxide semiconductor thin-film transistors for flexible electronics [J].
Petti, Luisa ;
Muenzenrieder, Niko ;
Vogt, Christian ;
Faber, Hendrik ;
Buethe, Lars ;
Cantarella, Giuseppe ;
Bottacchi, Francesca ;
Anthopoulos, Thomas D. ;
Troester, Gerhard .
APPLIED PHYSICS REVIEWS, 2016, 3 (02)
[27]   Atomic Layer Deposition of an Indium Gallium Oxide Thin Film for Thin-Film Transistor Applications [J].
Sheng, Jiazhen ;
Park, Eun Jung ;
Shong, Bonggeun ;
Park, Jin-Seong .
ACS APPLIED MATERIALS & INTERFACES, 2017, 9 (28) :23934-23940
[28]   Study of Positive-Gate-Bias-Induced Hump Phenomenon in Amorphous Indium-Gallium-Zinc Oxide Thin-Film Transistors [J].
Shi, Xuewen ;
Lu, Congyan ;
Duan, Xinlv ;
Chen, Qian ;
Ji, Hansai ;
Su, Yue ;
Chuai, Xichen ;
Liu, Dongyang ;
Zhao, Ying ;
Yang, Guanhua ;
Wang, Jiawei ;
Lu, Nianduan ;
Geng, Di ;
Li, Ling ;
Liu, Ming .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2020, 67 (04) :1606-1612
[29]   Thickness of accumulation layer in amorphous indium-gallium-zinc-oxide thin-film transistors by Kelvin Probe Force Microscopy [J].
Shi, Xuewen ;
Lu, Congyan ;
Xu, Guangwei ;
Yang, Guanhua ;
Lu, Nianduan ;
Ji, Zhuoyu ;
Geng, Di ;
Li, Ling ;
Liu, Ming .
APPLIED PHYSICS LETTERS, 2019, 114 (07)
[30]   Electrodeposited Cobalt-Sulfide Catalyst for Electrochemical and Photoelectrochemical Hydrogen Generation from Water [J].
Sun, Yujie ;
Liu, Chong ;
Grauer, David C. ;
Yano, Junko ;
Long, Jeffrey R. ;
Yang, Peidong ;
Chang, Christopher J. .
JOURNAL OF THE AMERICAN CHEMICAL SOCIETY, 2013, 135 (47) :17699-17702