On the magnetic field extraction for on-chip inductance calculation

The small dimensions of the on-chip interconnect structures provide the interesting opportunity of using the optimized model of dominant magnetic field even at very high operating frequencies for inductance and resistance extraction. The parameters are obtained from the field energy calculated from the magnetic field distribution in the simulation domain. Vector and scalar shape functions are used for finite element equation system assembling. Series of simulations for an on-chip spiral inductor at frequencies between 1 MHz and 100 GHz are performed to extract the parameters and to visualize the field distributions in the simulation area.