Structure and 3-D Model of a Solid State Thin-Film Magnetic Sensor

被引：0

作者：

Barylo, G., I ^{[1
]}

Holyaka, R. L. ^{[1
]}

Marusenkova, T. A. ^{[1
]}

Ivakh, M. S. ^{[1
]}

机构：

[1] Lviv Polytech Natl Univ, Lvov, Ukraine

来源：

PHYSICS AND CHEMISTRY OF SOLID STATE | 2021年 / 22卷 / 03期

关键词：

3-D magnetic sensor; split Hall structures; SPICE model;

D O I：

10.15330/pcss.22.3.444-452

中图分类号：

TB3 [工程材料学];

学科分类号：

0805 ; 080502 ;

摘要：

Vector 3-D magnetic sensors form the basis of measurement devices for magnetic field mapping and magnetic tracking. Typically, such sensors utilize specific constructions based on split Hall structures (SHS). An SHS-based 3-D magnetic sensor is a bulk semiconductor integrated structure with 8 or more contacts. Combining current flow directions through the contacts and measuring the corresponding voltages, one defines projections B-X, B-Y, B-Z of the magnetic field vector. This work presents a novel design of 3-D solid state magnetic sensors that requires no insulation by p-n junctions and can be implemented by thin-film technology traditionally used for fabrication of Hall sensors including those based on InSb films. Besides, a SPICE model of the 3-D magnetic sensor is provided, which helps design the proposed sensor and refine techniques of its calibration.

引用

页码：444 / 452

页数：9

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