Self-aligned vertical mirror and V-grooves applied to an optical-switch: modeling and optimization of bi-stable operation by electromagnetic actuation

被引：28

作者：

Maekoba, H

Helin, P

Reyne, G

Bourouina, T

Fujita, H

机构：

[1] Univ Tokyo, Inst Ind Sci, CNRS, LIMMS,Minato Ku, Tokyo 106, Japan

[2] Cybernet Syst Co Ltd, Bunkyo Ku, Tokyo 112, Japan

来源：

SENSORS AND ACTUATORS A-PHYSICAL | 2001年 / 87卷 / 03期

基金：

日本学术振兴会;

关键词：

optical switch; bi-stable; electro-magnetic actuation; FEM simulation; optimization;

D O I：

10.1016/S0924-4247(00)00473-8

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

High performance silicon-based, micro-optical switches are being developed for application to optical networks. The mechanical part was fabricated in a one-level mask step by bulk micromachining of (100) monocrystalline silicon with KOH. The resulting structure was assembled with a 100 mum-thick Permalloy piece and then, it was associated to a small magnetic circuit for its electromagnetic actuation. In order to avoid power consumption while hording ON and OFF states, a bi-stable operation principle is proposed. The bi-stable behavior is obtained by using a stable mechanical position due to the cantilever stiffness and a second magnetic stable position due to a permanent magnet. Switching operation is provided by electrical currents in windings. The aim of this paper is to present a study on modeling and optimization of this system by means of Finite Element Modelling (FEM) simulations, using ANSYS software. iterative magnetomechanical simulations are performed. Optimization of dimensions and material properties is presented. (C) 2001 Elsevier Science B.V. All rights reserved.

引用

页码：172 / 178

页数：7

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