Planar patterned magnetic media obtained by ion irradiation

被引：715
作者：
Chappert, C [1 ]
Bernas, H
Ferré, J
Kottler, V
Jamet, JP
Chen, Y
Cambril, E
Devolder, T
Rousseaux, F
Mathet, V
Launois, H
机构：
[1] Univ Paris Sud, Inst Elect Fondamentale, CNRS, Unite Rech Associee 022, F-91405 Orsay, France
[2] Univ Paris Sud, Ctr Spectrometrie Nucl & Spectrometrie Masse, CNRS, Unite Propre Rech 6412, F-91405 Orsay, France
[3] Univ Paris Sud, Phys Solides Lab, CNRS, Unite Rech Associee 02, F-91405 Orsay, France
[4] Microstruct & Microelect Lab, CNRS, Unite Propre Rech 020, F-92225 Bagneux, France
来源：
SCIENCE | 1998年 / 280卷 / 5371期
关键词：
D O I：
10.1126/science.280.5371.1919
中图分类号：
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号：
07 ; 0710 ; 09 ;
摘要：
By ion irradiation through a lithographically made resist mask, the magnetic properties of cobalt-platinum simple sandwiches and multilayers were patterned without affecting their roughness and optical properties. This was demonstrated on arrays of 1-micrometer lines by near- and far-field magnetooptical microscopy, The coercive force and magnetic anisotropy of the irradiated regions can be accurately controlled by the irradiation fluence. If combined with high-resolution lithography, this technique holds promise for ultrahigh-density magnetic recording applications.
引用
收藏
页码：1919 / 1922
页数：4
相关论文
共 28 条
  • [1] Stripe domains morphology versus layers thickness in CoPt multilayers
    Belliard, L
    Miltat, J
    Kottler, V
    Mathet, V
    Chappert, C
    Valet, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) : 5315 - 5317
  • [2] NEAR-FIELD MAGNETOOPTICS AND HIGH-DENSITY DATA-STORAGE
    BETZIG, E
    TRAUTMAN, JK
    WOLFE, R
    GYORGY, EM
    FINN, PL
    KRYDER, MH
    CHANG, CH
    [J]. APPLIED PHYSICS LETTERS, 1992, 61 (02) : 142 - 144
  • [3] MeV ion irradiation of Co/Cu multilayers
    Cai, M
    Veres, T
    Roorda, S
    Cochrane, RW
    Abdouche, R
    Sutton, M
    [J]. JOURNAL OF APPLIED PHYSICS, 1997, 81 (08) : 5200 - 5202
  • [4] 50-NM X-RAY-LITHOGRAPHY USING SYNCHROTRON-RADIATION
    CHEN, Y
    KUPKA, RK
    ROUSSEAUX, F
    CARCENAC, F
    DECANINI, D
    RAVET, MF
    LAUNOIS, H
    [J]. JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 1994, 12 (06): : 3959 - 3964
  • [5] SINGLE-DOMAIN MAGNETIC PILLAR ARRAY OF 35-NM DIAMETER AND 65-GBITS/IN(2) DENSITY FOR ULTRAHIGH DENSITY QUANTUM MAGNETIC STORAGE
    CHOU, SY
    WEI, MS
    KRAUSS, PR
    FISCHER, PB
    [J]. JOURNAL OF APPLIED PHYSICS, 1994, 76 (10) : 6673 - 6675
  • [6] Imprint lithography with 25-nanometer resolution
    Chou, SY
    Krauss, PR
    Renstrom, PJ
    [J]. SCIENCE, 1996, 272 (5258) : 85 - 87
  • [7] DEVILLE JP, 1993, MATER RES SOC SYMP P, V313, P519, DOI 10.1557/PROC-313-519
  • [8] Magnetic force microscopy of single-domain cobalt dots patterned using interference lithography
    Fernandez, A
    Bedrossian, PJ
    Baker, SL
    Vernon, SP
    Kania, DR
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1996, 32 (05) : 4472 - 4474
  • [9] Magneto-optical recording on patterned substrates
    Gadetsky, S
    Erwin, JK
    Mansuripur, M
    Suzuki, T
    [J]. JOURNAL OF APPLIED PHYSICS, 1996, 79 (08) : 5687 - 5692
  • [10] OUTLOOK FOR MAINTAINING AREAL DENSITY GROWTH-RATE IN MAGNETIC RECORDING
    GROCHOWSKI, E
    THOMPSON, DA
    [J]. IEEE TRANSACTIONS ON MAGNETICS, 1994, 30 (06) : 3797 - 3800
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