Planar patterned magnetic media obtained by ion irradiation

被引:719
作者
Chappert, C [1 ]
Bernas, H
Ferré, J
Kottler, V
Jamet, JP
Chen, Y
Cambril, E
Devolder, T
Rousseaux, F
Mathet, V
Launois, H
机构
[1] Univ Paris Sud, Inst Elect Fondamentale, CNRS, Unite Rech Associee 022, F-91405 Orsay, France
[2] Univ Paris Sud, Ctr Spectrometrie Nucl & Spectrometrie Masse, CNRS, Unite Propre Rech 6412, F-91405 Orsay, France
[3] Univ Paris Sud, Phys Solides Lab, CNRS, Unite Rech Associee 02, F-91405 Orsay, France
[4] Microstruct & Microelect Lab, CNRS, Unite Propre Rech 020, F-92225 Bagneux, France
关键词
D O I
10.1126/science.280.5371.1919
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
By ion irradiation through a lithographically made resist mask, the magnetic properties of cobalt-platinum simple sandwiches and multilayers were patterned without affecting their roughness and optical properties. This was demonstrated on arrays of 1-micrometer lines by near- and far-field magnetooptical microscopy, The coercive force and magnetic anisotropy of the irradiated regions can be accurately controlled by the irradiation fluence. If combined with high-resolution lithography, this technique holds promise for ultrahigh-density magnetic recording applications.
引用
收藏
页码:1919 / 1922
页数:4
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