共 23 条
[1]
MICROFABRICATION OF CANTILEVER STYLI FOR THE ATOMIC FORCE MICROSCOPE
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS,
1990, 8 (04)
:3386-3396
[2]
[Anonymous], 1962, Archive for Rational Mechanics and Analysis, DOI DOI 10.1007/BF00253946
[4]
Fabrication of nanoelectromechanical systems in single crystal silicon using silicon on insulator substrates and electron beam lithography
[J].
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B,
1997, 15 (06)
:2760-2763
[7]
STRAIN GRADIENT PLASTICITY - THEORY AND EXPERIMENT
[J].
ACTA METALLURGICA ET MATERIALIA,
1994, 42 (02)
:475-487