A facile hot-pressing process for fabricating flexible top electrodes of piezoelectric ZnO nanowire nanogenerators

被引:10
作者
Yang, Wenliang [1 ,2 ]
Wang, Yanfang [1 ]
Hou, Zhongyu [1 ]
Li, Changlin [1 ,2 ]
机构
[1] Shanghai Jiao Tong Univ, Sch Elect Informat & Elect Engn, Dept Micro Nano Elect, Natl Key Lab Micro Nano Fabricat Technol, Shanghai 200240, Peoples R China
[2] Shanghai Jiao Tong Univ, Dept Micro Nano Elect, Sch Elect Informat & Elect Engn, Shanghai 200240, Peoples R China
基金
中国国家自然科学基金;
关键词
nanogenerator; ZnO; nanowires; piezoelectric; hot-pressing; THIN-FILM NANOGENERATOR; OUTPUT; ARRAYS;
D O I
10.1088/1361-6528/ab3e14
中图分类号
TB3 [工程材料学];
学科分类号
0805 ; 080502 ;
摘要
We report a facile and effective hot-pressing strategy for fabricating the flexible top electrode for a piezoelectric nanogenerator (PENG). Flexible stainless steel (SUS) foil was employed as the bottom electrode and substrate of the device. Zinc oxide nanowires (ZnO NWs) were grown on SUS substrate through the hydrothermal synthesis method. The top electrode of Zn foil was combined with dielectric polydimethylsiloxane (PDMS) film using the hot-pressing process. The resulting top electrode is thick enough to enable the device to generate piezoelectric output differently under bending conditions. The PENG devices generated an output voltage of about 2.2 V and an output current of 8 nA under the optimum operating conditions. The devices fabricated by the hot-pressing process were robust enough to retain their generating ability after thousands of bending and releasing cycles.
引用
收藏
页数:6
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