Combined STEM-EDS tomography of nanowire structures

被引：13

作者：

Bender, Hugo ^{[1
]}

Richard, Olivier ^{[1
]}

Kundu, Paromita ^{[1
]}

Favia, Paola ^{[1
]}

Zhong, Zhichao ^{[2
]}

Palenstijn, Willem Jan ^{[2
]}

Batenburg, Kees Joost ^{[2
]}

Wirix, Maarten ^{[3
]}

Kohr, Holger ^{[3
]}

Schoenmakers, Remco ^{[3
]}

机构：

[1] IMEC, Kapeldreef 75, B-3001 Leuven, Belgium

[2] Ctr Wiskunde & Informat, Amsterdam, Netherlands

[3] Thermo Fisher Sci, Achtseweg Noord 5, NL-5600 KA Eindhoven, Netherlands

来源：

SEMICONDUCTOR SCIENCE AND TECHNOLOGY | 2019年 / 34卷 / 11期

关键词：

STEM tomography; EDS tomography; HEBT tomography reconstruction; nanowire device; pillar tomography sample; RECONSTRUCTION; ABSORPTION;

D O I：

10.1088/1361-6641/ab4840

中图分类号：

TM [电工技术]; TN [电子技术、通信技术];

学科分类号：

0808 ; 0809 ;

摘要：

The 3D spatial resolution, the material contrast and the evolution of the noise are analyzed in the reconstructed volume of a combined scanning transmission electron microscopy (HAADF-STEM) and energy dispersive x-ray spectroscopy (EDS) tomography experiment. Standard simultaneous iterative reconstruction technique and HAADF-EDS bimodal tomographic reconstruction are considered for the +/-90 degrees tomography series of a pillar shaped sample embedding a full nanowire device. With a high number of iterations, a spatial resolution for both HAADF and EDS down to 5 nanometer can be reached for this volume. Best material's contrast and minimum noise are obtained for medium number of iterations. Improvement of the signal-to-noise and contrast can be obtained by filtering the EDS data while the spatial resolution is not impacted. A fast and reliable preparation methodology for rectangularly shaped pillar samples for tomography analysis is discussed.

引用

页数：12

共 25 条

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