Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

被引：29

作者：

Il'in, K. ^{[1
]}

Hofherr, M. ^{[1
]}

Rall, D. ^{[1
]}

Siegel, M. ^{[1
]}

Semenov, A. ^{[2
]}

Engel, A. ^{[3
]}

Inderbitzin, K. ^{[3
]}

Aeschbacher, A. ^{[3
]}

Schilling, A. ^{[3
]}

机构：

[1] Karlsruher Inst Technol, Inst Mikro & Nanoelekt Syst, D-76187 Karlsruhe, Germany

[2] DLR Inst Planetary Res, D-12489 Berlin, Germany

[3] Univ Zurich, Inst Phys, CH-8057 Zurich, Switzerland

来源：

JOURNAL OF LOW TEMPERATURE PHYSICS | 2012年 / 167卷 / 5-6期

关键词：

TaN; Superconducting thin films; Superconducting detectors;

D O I：

10.1007/s10909-011-0424-3

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T (C)=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm(2) at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

引用

页码：809 / 814

页数：6

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