Ultra-thin TaN Films for Superconducting Nanowire Single-Photon Detectors

被引：31

作者：

Il'in, K. ^{[1
]}

Hofherr, M. ^{[1
]}

Rall, D. ^{[1
]}

Siegel, M. ^{[1
]}

Semenov, A. ^{[2
]}

Engel, A. ^{[3
]}

Inderbitzin, K. ^{[3
]}

Aeschbacher, A. ^{[3
]}

Schilling, A. ^{[3
]}

机构：

[1] Karlsruher Inst Technol, Inst Mikro & Nanoelekt Syst, D-76187 Karlsruhe, Germany

[2] DLR Inst Planetary Res, D-12489 Berlin, Germany

[3] Univ Zurich, Inst Phys, CH-8057 Zurich, Switzerland

来源：

JOURNAL OF LOW TEMPERATURE PHYSICS | 2012年 / 167卷 / 5-6期

关键词：

TaN; Superconducting thin films; Superconducting detectors;

D O I：

10.1007/s10909-011-0424-3

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

Ultra-thin films of superconducting tantalum nitride are deposited by reactive magnetron sputtering on heated sapphire substrates. The critical temperature T (C)=10.25 K is reached for films thicker than 10 nm. A superconducting nanowire single-photon detector in the form of a meander line with a width of 110 nm was made from 5 nm thick TaN film. The detector had a transition temperature of 8.3 K and a critical current density of 4 MA/cm(2) at 4.2 K. A photon detection efficiency of 20% has been obtained for the detector with a filling factor of 0.55 at wavelengths up to 700 nm.

引用

页码：809 / 814

页数：6

共 11 条

[1] Superconducting nanowire single-photon detector in an optical cavity for front-side illumination [J].

Baek, Burm ;

Stern, Jeffrey A. ;

Nam, Sae Woo .

APPLIED PHYSICS LETTERS, 2009, 95 (19)

[2] Current-assisted thermally activated flux liberation in ultrathin nanopatterned NbN superconducting meander structures [J].

Bartolf, H. ;

Engel, A. ;

Schilling, A. ;

Il'in, K. ;

Siegel, M. ;

Huebers, H. -W. ;

Semenov, A. .

PHYSICAL REVIEW B, 2010, 81 (02)

[3] Vortex-induced dissipation in narrow current-biased thin-film superconducting strips [J].

Bulaevskii, L. N. ;

Graf, M. J. ;

Batista, C. D. ;

Kogan, V. G. .

PHYSICAL REVIEW B, 2011, 83 (14)

[4] Intrinsic detection efficiency of superconducting nanowire single-photon detectors with different thicknesses [J].

Hofherr, M. ;

Rall, D. ;

Ilin, K. ;

Siegel, M. ;

Semenov, A. ;

Huebers, H.-W. ;

Gippius, N. A. .

JOURNAL OF APPLIED PHYSICS, 2010, 108 (01)

[5]

Il'in K. S., 2004, I PHYS C SER, V181, P2895

[6] Phonon related properties of transition metals, their carbides, and nitrides: A first-principles study [J].

Isaev, E. I. ;

Simak, S. I. ;

Abrikosov, I. A. ;

Ahuja, R. ;

Vekilov, Yu. Kh. ;

Katsnelson, M. I. ;

Lichtenstein, A. I. ;

Johansson, B. .

JOURNAL OF APPLIED PHYSICS, 2007, 101 (12)

[7] Characteristics of ultrathin Ta and TaN films [J].

Rossnagel, SM .

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B, 2002, 20 (06) :2328-2336

[8] Spectral cut-off in the efficiency of the resistive state formation caused by absorption of a single-photon in current-carrying superconducting nano-strips [J].

Semenov, A ;

Engel, A ;

Hübers, HW ;

Il'in, K ;

Siegel, M .

EUROPEAN PHYSICAL JOURNAL B, 2005, 47 (04) :495-501

[9] Optical and transport properties of ultrathin NbN films and nanostructures [J].

Semenov, A. ;

Guenther, B. ;

Boettger, U. ;

Huebers, H. -W. ;

Bartolf, H. ;

Engel, A. ;

Schilling, A. ;

Ilin, K. ;

Siegel, M. ;

Schneider, R. ;

Gerthsen, D. ;

Gippius, N. A. .

PHYSICAL REVIEW B, 2009, 80 (05)

[10] Study of NbN Josephson junctions with a tantalum nitride barrier tuned to the metal-insulator transition [J].

Setzu, R. ;

Baggetta, E. ;

Villegier, J. C. .

8TH EUROPEAN CONFERENCE ON APPLIED SUPERCONDUCTIVITY (EUCAS'07), 2008, 97

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