An improved method of angle measurement with a position sensitive detector

被引：0
作者：
Zheng, Defeng [1 ,2 ]
Wang, Xiangzhao [1 ]
Tang, Feng [1 ]
机构：
[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Informat Opt Lab, Shanghai 201800, Peoples R China
[2] Chinese Acad Sci, Grad Sch, Beijing 100039, Peoples R China
来源：
CHINESE OPTICS LETTERS | 2007年 / 5卷 / 07期
关键词：
D O I：
暂无
中图分类号：
O43 [光学];
学科分类号：
070207 ; 0803 ;
摘要：
An improved method of angle measurement is proposed based on a parallel plate interferometer. A position detection system is incorporated into a parallel plate interferometer in order to realize large deflection angle measurement. A reflecting mirror is introduced for increasing the measurement resolution. In experiments, a deflection angle of a measured target was measured within similar to 3 degrees with high accuracy. And as a phase modulating interferometer, it was used to measure a small angular displacement with a repeatability of 5.5 x 10(-8) rad.
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页码：403 / 406
页数：4
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