Radiation damage microstructures in silicon and application in position sensitive charged particle detection

被引:11
作者
Jaksic, M [1 ]
Medunic, Z [1 ]
Bogovac, M [1 ]
Skukan, N [1 ]
机构
[1] Rudjer Boskovic Inst, Zagreb 10002, Croatia
关键词
radiation damage; silicon detectors; IBIC; position sensitive detectors;
D O I
10.1016/j.nimb.2005.01.107
中图分类号
TH7 [仪器、仪表];
学科分类号
0804 ; 080401 ; 081102 ;
摘要
Area selective irradiation using MeV ions having different ranges has been performed in a nuclear microprobe to produce radiation damage microstructures in silicon photodiodes. IBIC (Ion Beam Induced Charge) technique has been used for on line monitoring of radiation damage produced by different fluences of He, Li and O ions of MeV energies. Three-dimensional patterning of radiation damage structures may be used for different applications. By creating a region of constant damage gradient in Si photodiode, position sensitive radiation detection has been demonstrated. (c) 2005 Elsevier B.V. All rights reserved.
引用
收藏
页码:502 / 506
页数:5
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