WEAR RESISTANCE OF α- AND β- GALLIUM OXIDE COATINGS

被引:0
作者
Butenko, P. N. [1 ]
Guzilova, L. I. [1 ]
Chikiryaka, A. V. [1 ]
Pechnikov, A. I. [1 ]
Grashchenko, A. S. [2 ]
Pozdnyakov, A. O. [1 ]
Nikolaev, V. I. [1 ]
机构
[1] RAS, Ioffe Inst, St Petersburg, Russia
[2] RAS, Inst Problems Mech Engn, St Petersburg, Russia
来源
MATERIALS PHYSICS AND MECHANICS | 2021年 / 47卷 / 01期
关键词
gallium oxide; protective coatings; tribology; coefficient of friction; COF; wear resistance; SAPPHIRE; LAYERS; FRICTION;
D O I
10.18149/MPM.4712021_5
中图分类号
T [工业技术];
学科分类号
08 ;
摘要
Mechanical wear resistance of the alpha- and beta- Ga2O3 polymorphs is experimentally studied. We report about tribological cyclic tests of these wide-band-gap semiconductor crystals. To the best of our knowledge, this is the first attempt at considering these crystals as protective coatings. The crystalline layers were deposited on sapphire substrates by vapourphase epitaxy. This method allows applying coatings on large areas and surfaces of complex shapes, including the surfaces of a number of metals. It has been revealed, that both polymorphs are highly wear-resistant, and suddenly have a very low coefficient of friction. The alpha- Ga2O3 layers with the corundum structure exhibit wear coefficient values commensurate with those of sapphire and gallium nitride.
引用
收藏
页码:52 / 58
页数:7
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