Three-dimensional microfluidic channel with arbitrary length and configuration fabricated inside glass by femtosecond laser direct writing

被引：89

作者：

Liao, Yang ^{[1
,2
]}

Ju, Yongfeng ^{[1
,2
]}

Zhang, Long ^{[1
]}

He, Fei ^{[1
,2
]}

Zhang, Qiang ^{[2
,3
]}

Shen, Yinglong ^{[2
,3
]}

Chen, Danping ^{[3
]}

Cheng, Ya ^{[1
]}

Xu, Zhizhan ^{[1
]}

Sugioka, Koji ^{[4
]}

Midorikawa, Katsumi ^{[4
]}

机构：

[1] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, State Key Lab High Field Laser Phys, Shanghai 201800, Peoples R China

[2] Chinese Acad Sci, Grad Sch, Beijing 100049, Peoples R China

[3] Chinese Acad Sci, Shanghai Inst Opt & Fine Mech, Key Lab Mat Sci & Technol High Power Lasers, Shanghai 201800, Peoples R China

[4] RIKEN, Adv Sci Inst, Laser Technol Lab, Wako, Saitama 3510198, Japan

来源：

OPTICS LETTERS | 2010年 / 35卷 / 19期

基金：

中国国家自然科学基金;

关键词：

FUSED-SILICA; MICROCHANNELS; MICROFABRICATION; SHAPE;

D O I：

10.1364/OL.35.003225

中图分类号：

O43 [光学];

学科分类号：

070207 ; 0803 ;

摘要：

We demonstrate, for the first time to the best of our knowledge, fabrication of three-dimensional microfluidic channels with arbitrary lengths and configurations inside glass by femtosecond laser direct writing. The main fabrication process includes two steps: (1) direct formation of hollow microchannels in a porous glass substrate immersed in water by femtosecond laser ablation and (2) postannealing of the glass substrate at similar to 1150 degrees C by which the porous glass can be consolidated. We show that a square-wavelike channel with a total length of similar to 1.4 cm and a diameter of similar to 64 mu m can be easily produced similar to 250 mu m beneath the glass surface. (C) 2010 Optical Society of America

引用

页码：3225 / 3227

页数：3

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