Application of scanning confocal electron microscopy to nanomaterials and the improvement in resolution by image processing

被引：0

作者：

Zhang, X. ^{[1
]}

Takeguchi, M. ^{[1
,2
,3
]}

Hashimoto, A. ^{[3
]}

Mitsuishi, K. ^{[1
,4
]}

Shimojo, M. ^{[1
,2
]}

机构：

[1] Saitama Inst Technol, Adv Sci Res Lab, 1690 Fusaiji, Fukaya, Saitama 3690293, Japan

[2] Natl Inst Mat Sci, High Voltage Electr Microscopy Stn, Tsukuba, Ibaraki 3050003, Japan

[3] Natl Inst Mat Sci, Adv Nanocharacterizat Ctr, Tsukuba, Ibaraki 3050003, Japan

[4] Natl Inst Mat Sci, Quantum Dot Res Ctr, Tsukuba, Ibaraki 3050003, Japan

来源：

ADVANCED MATERIAL SCIENCE AND TECHNOLOGY, PTS 1 AND 2 | 2011年 / 675-677卷

关键词：

nanomaterials; three-dimessional SCEM images; image processing; deconvolution;

D O I：

10.4028/www.scientific.net/MSF.675-677.259

中图分类号：

T [工业技术];

学科分类号：

08 ;

摘要：

Scanning confocal electron microscopy (SCEM) is a novel technique for three-dimensional observation with a nanometer-scale resolution. Annular dark field (ADF) SCEM imaging has been demonstrated to have better depth resolution than bright field (BF) SCEM imaging. However, the depth resolution of ADF-SCEM images is limited by the vertical probe size determined by spherical aberration and convergence angle. Therefore, we attempted to employ a deconvolution image processing method to improve the depth resolution of SCEM images. The result of the deconvolution process for vertically sliced SCEM images showed the improvement in the depth resolution by 35-40%.

引用

页码：259 / +

页数：2

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