Pinhole-seeded lateral epitaxy and exfoliation of GaSb films on graphene-terminated surfaces

被引:36
作者
Manzo, Sebastian [1 ]
Strohbeen, Patrick J. [1 ]
Lim, Zheng Hui [1 ]
Saraswat, Vivek [1 ]
Du, Dongxue [1 ]
Xu, Shining [2 ]
Pokharel, Nikhil [2 ]
Mawst, Luke J. [2 ]
Arnold, Michael S. [1 ]
Kawasaki, Jason K. [1 ]
机构
[1] Univ Wisconsin, Mat Sci & Engn, Madison, WI 53706 USA
[2] Univ Wisconsin, Elect & Comp Engn, Madison, WI 53706 USA
基金
美国国家科学基金会;
关键词
OVERGROWTH; GAAS; LAYER; OXIDATION; GROWTH; SI;
D O I
10.1038/s41467-022-31610-y
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
Remote epitaxy represents a promising method for the synthesis of thin films on lattice-mismatched substrates, but its atomic-scale mechanisms are still unclear. Here, the authors demonstrate the growth of exfoliatable GaSb films on graphene-terminated GaSb (001) via seeded lateral epitaxy, showing that pinhole defects in graphene serve as selective nucleation sites. Remote epitaxy is a promising approach for synthesizing exfoliatable crystalline membranes and enabling epitaxy of materials with large lattice mismatch. However, the atomic scale mechanisms for remote epitaxy remain unclear. Here we experimentally demonstrate that GaSb films grow on graphene-terminated GaSb (001) via a seeded lateral epitaxy mechanism, in which pinhole defects in the graphene serve as selective nucleation sites, followed by lateral epitaxy and coalescence into a continuous film. Remote interactions are not necessary in order to explain the growth. Importantly, the small size of the pinholes permits exfoliation of continuous, free-standing GaSb membranes. Due to the chemical similarity between GaSb and other III-V materials, we anticipate this mechanism to apply more generally to other materials. By combining molecular beam epitaxy with in-situ electron diffraction and photoemission, plus ex-situ atomic force microscopy and Raman spectroscopy, we track the graphene defect generation and GaSb growth evolution a few monolayers at a time. Our results show that the controlled introduction of nanoscale openings in graphene provides an alternative route towards tuning the growth and properties of 3D epitaxial films and membranes on 2D material masks.
引用
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页数:9
相关论文
共 41 条
[31]   Graphene Buffer Layer on SiC as a Release Layer for High-Quality Freestanding Semiconductor Membranes [J].
Qiao, Kuan ;
Liu, Yunpeng ;
Kim, Chansoo ;
Molnar, Richard J. ;
Osadchy, Tom ;
Li, Wenhao ;
Sun, Xuechun ;
Li, Huashan ;
Myers-Ward, Rachael L. ;
Lee, Doyoon ;
Subramanian, Shruti ;
Kim, Hyunseok ;
Lu, Kuangye ;
Robinson, Joshua A. ;
Kong, Wei ;
Kim, Jeehwan .
NANO LETTERS, 2021, 21 (09) :4013-4020
[32]   THEORETICAL-STUDIES OF ICOSAHEDRAL C60 AND SOME RELATED SPECIES [J].
STONE, AJ ;
WALES, DJ .
CHEMICAL PHYSICS LETTERS, 1986, 128 (5-6) :501-503
[33]   Oxidation of Suspended Graphene: Etch Dynamics and Stability Beyond 1000 °C [J].
Thomsen, Joachim Dahl ;
Kling, Jens ;
Mackenzie, David M. A. ;
Boggild, Peter ;
Booth, Timothy J. .
ACS NANO, 2019, 13 (02) :2281-2288
[34]   EPITAXIAL LATERAL OVERGROWTH OF GAAS ON A SI SUBSTRATE [J].
UJIIE, Y ;
NISHINAGA, T .
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS, 1989, 28 (03) :L337-L339
[35]  
van 't Erve OMJ, 2012, NAT NANOTECHNOL, V7, P737, DOI [10.1038/nnano.2012.161, 10.1038/NNANO.2012.161]
[36]   In-situ reflectance monitoring of GaSb substrate oxide desorption [J].
Vineis, CJ ;
Wang, CA ;
Jensen, KF .
JOURNAL OF CRYSTAL GROWTH, 2001, 225 (2-4) :420-425
[37]   Seed-Initiated Anisotropic Growth of Unidirectional Armchair Graphene Nanoribbon Arrays on Germanium [J].
Way, Austin J. ;
Jacobberger, Robert M. ;
Arnold, Michael S. .
NANO LETTERS, 2018, 18 (02) :898-906
[38]   Coherent, atomically thin transition-metal dichalcogenide superlattices with engineered strain [J].
Xie, Saien ;
Tu, Lijie ;
Han, Yimo ;
Huang, Lujie ;
Kang, Kibum ;
Lao, Ka Un ;
Poddar, Preeti ;
Park, Chibeom ;
Muller, David A. ;
DiStasio, Robert A., Jr. ;
Park, Jiwoong .
SCIENCE, 2018, 359 (6380) :1131-1135
[39]   Lateral epitaxial overgrowth of GaSb on GaSb and GaAs substrates by metalorganic chemical vapor deposition [J].
Yi, SS ;
Hansen, DM ;
Inoki, CK ;
Harris, DL ;
Kuan, TS ;
Kuech, TF .
APPLIED PHYSICS LETTERS, 2000, 77 (06) :842-844
[40]   Full orientation control of epitaxial MoS2 on hBN assisted by substrate defects [J].
Zhang, Fu ;
Wang, Yuanxi ;
Erb, Chad ;
Wang, Ke ;
Moradifar, Parivash ;
Crespi, Vincent H. ;
Alem, Nasim .
PHYSICAL REVIEW B, 2019, 99 (15)