Reduction of Gate-Induced Drain Leakage Current of Polycrystalline Silicon Thin-Film Transistor by Drain Bias Sweeping

被引:0
作者
Zhang, Dongli [1 ]
Wang, Mingxing [1 ]
Wang, Huaisheng [1 ]
Wu, Yong [2 ]
Zhou, Haiqin [2 ]
He, Jin [3 ]
机构
[1] Soochow Univ, Dept Microelect, Suzhou 215006, Peoples R China
[2] Tianma Microelect Co Ltd, Shenzhen 518052, Peoples R China
[3] Peking Univ, Shenzhen SoC Key Lab, PKU HKUST Shenzhen Hongkong Inst, Shenzhen 518052, Peoples R China
来源
PROCEEDINGS OF THE 22ND INTERNATIONAL SYMPOSIUM ON THE PHYSICAL AND FAILURE ANALYSIS OF INTEGRATED CIRCUITS (IPFA 2015) | 2015年
关键词
CRYSTALLIZATION;
D O I
暂无
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
Method of drain bias sweeping is reported to reduce the gate-induced drain leakage (GIDL) current but with other electrical parameters unaffected for p-type polycrystalline silicon thin-film transistors. It is proposed to be due to local electron trapping in the gate oxide near the drain after drain-bias sweeping such that the gate bias effect is screened. The effects of drain bias sweeping can be achieved equivalently by a DC bias stress. It is further proposed that pulsed drain bias sweeping is a most reliable method to achieve suppressed GIDL current and unaffected subthreshold and on-state characteristics.
引用
收藏
页码:382 / 385
页数:4
相关论文
共 10 条
[1]  
Chen J., 1987, INT EL DEV M IEDM 87, P718
[2]   Temperature dependent leakage currents in polycrystalline silicon thin film transistors [J].
Kim, CH ;
Sohn, KS ;
Jang, J .
JOURNAL OF APPLIED PHYSICS, 1997, 81 (12) :8084-8090
[3]   A Two-Stage Degradation Model of p-Channel Low-Temperature Poly-Si Thin-Film Transistors Under Positive Bias Temperature Stress [J].
Lu, Xiaowei ;
Wang, Mingxiang ;
Wong, Man .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2011, 58 (10) :3501-3505
[4]  
Meng Z., 2001, IEDM
[5]   The effects of high temperature annealing on metal-induced laterally crystallized polycrystalline silicon [J].
Wang, MX ;
Meng, ZG ;
Wong, M .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2000, 47 (11) :2061-2067
[6]  
Wu I.-W., 1990, International Electron Devices Meeting 1990. Technical Digest (Cat. No.90CH2865-4), P867, DOI 10.1109/IEDM.1990.237025
[7]   High-performance metal-induced lateral-crystallization polysilicon thin-film transistors with multiple nanowire channels and multiple gates [J].
Wu, Yung-Chun ;
Chang, Ting-Chang ;
Liu, Po-Tsun ;
Chou, Cheng-Wei ;
Wu, Yuan-Chun ;
Tu, Chun-Hao ;
Chang, Chun-Yen .
IEEE TRANSACTIONS ON NANOTECHNOLOGY, 2006, 5 (03) :157-162
[8]   A polycrystalline silicon thin-film transistor with self-aligned metal electrodes formed using aluminum-induced crystallization [J].
Zhang, Dongli ;
Chow, Thomas ;
Wong, Man .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2008, 55 (08) :2181-2186
[9]   Bridged-Grain Polycrystalline Silicon Thin-Film Transistors [J].
Zhao, Shuyun ;
Meng, Zhiguo ;
Zhou, Wei ;
Ho, Jacob ;
Wong, Man ;
Kwok, Hoi-Sing .
IEEE TRANSACTIONS ON ELECTRON DEVICES, 2013, 60 (06) :1965-1970
[10]   Drain voltage sweeping-induced degradation in n-type low-temperature polysilicon thin film transistors [J].
Zhou, Dapeng ;
Wang, Mingxiang ;
Hao, Han ;
Zhang, Dongli ;
Wong, Man .
SEMICONDUCTOR SCIENCE AND TECHNOLOGY, 2010, 25 (04)